The electrostatic shuffle motor

Niels Roelof Tas, R. Legtenberg, Johan W. Berenschot, Michael Curt Elwenspoek, J.H.J. Fluitman

    Research output: Other contributionOther research output

    Original languageUndefined
    Publication statusPublished - 4 Sep 1995

    Keywords

    • METIS-114947

    Cite this

    Tas, N. R., Legtenberg, R., Berenschot, J. W., Elwenspoek, M. C., & Fluitman, J. H. J. (1995, Sep 4). The electrostatic shuffle motor.