The electrostatic shuffle motor

Niels Roelof Tas, R. Legtenberg, Johan W. Berenschot, Michael Curt Elwenspoek, J.H.J. Fluitman

    Research output: Other contribution › Other research output

    Original languageUndefined
    Publication statusPublished - 4 Sep 1995

    Keywords

    • METIS-114947

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