The electrostatic shuffle motor

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

Original language	English
Title of host publication	Micromechanics Europe Workshop 1995
Pages	128-131
Publication status	Published - 4 Sept 1995
Event	6th Micromechanics Europe Workshop, MME 1995 - Copenhagen, Denmark Duration: 3 Sept 1995 → 5 Sept 1995 Conference number: 6

Conference	6th Micromechanics Europe Workshop, MME 1995
Abbreviated title	MME
Country/Territory	Denmark
City	Copenhagen
Period	3/09/95 → 5/09/95

Keywords

@inproceedings{7d77ce7ed19e4fbe8fdd02f93b04c0f6,

title = "The electrostatic shuffle motor",

keywords = "METIS-114109, IR-17214",

author = "Tas, \{Niels Roelof\} and R. Legtenberg and Berenschot, \{Johan W.\} and Elwenspoek, \{Michael Curt\} and J.H.J. Fluitman",

year = "1995",

month = sep,

day = "4",

language = "English",

pages = "128--131",

booktitle = "Micromechanics Europe Workshop 1995",

note = "6th Micromechanics Europe Workshop, MME 1995, MME ; Conference date: 03-09-1995 Through 05-09-1995",

}

TY - GEN

T1 - The electrostatic shuffle motor

AU - Tas, Niels Roelof

AU - Legtenberg, R.

AU - Berenschot, Johan W.

AU - Elwenspoek, Michael Curt

AU - Fluitman, J.H.J.

N1 - Conference code: 6

PY - 1995/9/4

Y1 - 1995/9/4

KW - METIS-114109

KW - IR-17214

M3 - Conference contribution

SP - 128

EP - 131

BT - Micromechanics Europe Workshop 1995

T2 - 6th Micromechanics Europe Workshop, MME 1995

Y2 - 3 September 1995 through 5 September 1995

ER -