The fabrication of a three dimensional structure consisting of silicon plates interconnected by polyimide

B.J. Kooi, Joost Conrad Lötters, Wouter Olthuis

    Research output: Other contribution › Other research output

    Original languageUndefined
    Place of PublicationEnschede
    Publication statusPublished - 11 Jun 1997

    Keywords

    • METIS-114990

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