The influence of cell window imperfections on the calibration and measured data of two types of rotating-analyzer ellipsometers

A. Straaijer, L.J. Hanekamp, G.A. Bootsma

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    Abstract

    A graphical method has been developed to determine the plane of incidence in the presence of cell windows with small retardation. For two types of rotating-analyzer ellipsometers, expressions have been derived that relate the experimental parameters and the elements of the Mueller imperfection matrices of the windows. These matrices can be determined by measuring with and without cell windows. Measurements have been performed with three samples with different optical constants.
    Original languageUndefined
    Pages (from-to)217-231
    JournalSurface science
    Volume96
    Issue number1-3
    DOIs
    Publication statusPublished - 1980

    Keywords

    • IR-68491

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