The influence of charge-mode operation of a XeCl laser on the beam profile

F.A. van Goor, J.C.M. Timmermans, W.J. Witteman

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The shape of the beam profile of a discharge excited XeCl excimer laser using a spiker-sustainer electrical circuit has been varied from a `bell¿-, through a `top-hat¿-, to a `camel-back¿-profile by varying the delay between the spiker pulse and the main-current with the circuit operating in the charge-mode. Fine-tuning of the beam profile can be done by varying the charging voltage of the main pulse forming network or the temperature of a gas purifier regulating the Xe and HCl partial pressures.
Original languageUndefined
Pages (from-to)56-62
JournalOptics communications
Issue number1-2
Publication statusPublished - 1996


  • IR-57261

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