The influence of charge-mode operation of a XeCl laser on the beam profile

F.A. van Goor; J.C.M. Timmermans; W.J. Witteman

doi:10.1016/0030-4018(95)00624-9

The influence of charge-mode operation of a XeCl laser on the beam profile

F.A. van Goor, J.C.M. Timmermans, W.J. Witteman

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Abstract

The shape of the beam profile of a discharge excited XeCl excimer laser using a spiker-sustainer electrical circuit has been varied from a `bell¿-, through a `top-hat¿-, to a `camel-back¿-profile by varying the delay between the spiker pulse and the main-current with the circuit operating in the charge-mode. Fine-tuning of the beam profile can be done by varying the charging voltage of the main pulse forming network or the temperature of a gas purifier regulating the Xe and HCl partial pressures.

Original language	Undefined
Pages (from-to)	56-62
Journal	Optics communications
Volume	124
Issue number	1-2
DOIs	https://doi.org/10.1016/0030-4018(95)00624-9
Publication status	Published - 1996

Keywords

IR-57261

Access to Document

10.1016/0030-4018(95)00624-9

Goor96influence

Cite this

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title = "The influence of charge-mode operation of a XeCl laser on the beam profile",

abstract = "The shape of the beam profile of a discharge excited XeCl excimer laser using a spiker-sustainer electrical circuit has been varied from a `bell¿-, through a `top-hat¿-, to a `camel-back¿-profile by varying the delay between the spiker pulse and the main-current with the circuit operating in the charge-mode. Fine-tuning of the beam profile can be done by varying the charging voltage of the main pulse forming network or the temperature of a gas purifier regulating the Xe and HCl partial pressures.",

keywords = "IR-57261",

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journal = "Optics communications",

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T1 - The influence of charge-mode operation of a XeCl laser on the beam profile

AU - van Goor, F.A.

AU - Timmermans, J.C.M.

AU - Witteman, W.J.

PY - 1996

Y1 - 1996

N2 - The shape of the beam profile of a discharge excited XeCl excimer laser using a spiker-sustainer electrical circuit has been varied from a `bell¿-, through a `top-hat¿-, to a `camel-back¿-profile by varying the delay between the spiker pulse and the main-current with the circuit operating in the charge-mode. Fine-tuning of the beam profile can be done by varying the charging voltage of the main pulse forming network or the temperature of a gas purifier regulating the Xe and HCl partial pressures.

AB - The shape of the beam profile of a discharge excited XeCl excimer laser using a spiker-sustainer electrical circuit has been varied from a `bell¿-, through a `top-hat¿-, to a `camel-back¿-profile by varying the delay between the spiker pulse and the main-current with the circuit operating in the charge-mode. Fine-tuning of the beam profile can be done by varying the charging voltage of the main pulse forming network or the temperature of a gas purifier regulating the Xe and HCl partial pressures.

KW - IR-57261

U2 - 10.1016/0030-4018(95)00624-9

DO - 10.1016/0030-4018(95)00624-9

M3 - Article

SN - 0030-4018

VL - 124

SP - 56

EP - 62

JO - Optics communications

JF - Optics communications

IS - 1-2

ER -