The Influence of Fluorine on the Stress-Induced Leakage Current Characteristics in n+ Poly-Si MOS Capacitors

V.E. Houtsma, J. Holleman, P.H. Woerlee, A.J. Hof

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

Keywords

@inproceedings{b682db23bc444abfa4491e222e116eab,

title = "The Influence of Fluorine on the Stress-Induced Leakage Current Characteristics in n+ Poly-Si MOS Capacitors",

keywords = "METIS-113846",

author = "V.E. Houtsma and J. Holleman and P.H. Woerlee and A.J. Hof",

year = "1998",

month = nov,

day = "25",

language = "Undefined",

isbn = "90-73461-15-4",

pages = "221--224",

booktitle = "Proceedings of the SAFE'98",

}

TY - GEN

T1 - The Influence of Fluorine on the Stress-Induced Leakage Current Characteristics in n+ Poly-Si MOS Capacitors

AU - Houtsma, V.E.

AU - Holleman, J.

AU - Woerlee, P.H.

AU - Hof, A.J.

PY - 1998/11/25

Y1 - 1998/11/25

KW - METIS-113846

M3 - Conference contribution

SN - 90-73461-15-4

SP - 221

EP - 224

BT - Proceedings of the SAFE'98

CY - Mierlo, the Netherlands

ER -