The influence of oxide layer thickness on light sensitivity and drift of Ta2O5-gate ISFET

A. Bratov, Johan G. Bomer, Piet Bergveld, Wouter Olthuis

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    Original languageUndefined
    Title of host publicationDigest of the 4th international meeting on Chemical Sensors
    Place of PublicationTokyo, Japan
    Pages742-743
    Number of pages2
    Publication statusPublished - 13 Sep 1992

    Keywords

    • METIS-114162

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