The influence of Tantalum content in relation to substrate temperature on magnetic and structural properties of Co-Cr-Ta thin films

Phan Le Kim; Cock Lodder; Nguyen Hoang Luong; Than Duc Hien

doi:10.1016/S0304-8853(98)00412-0

The influence of Tantalum content in relation to substrate temperature on magnetic and structural properties of Co-Cr-Ta thin films

Phan Le Kim^*, Cock Lodder, Nguyen Hoang Luong, Than Duc Hien

^*Corresponding author for this work

Research output: Contribution to journal › Article › Academic › peer-review

10 Citations (Scopus)

Abstract

In this study, we investigated the influence of Ta content (in Co86Cr12Ta2 and Co82Cr13Ta5 compositions) on magnetic and structural properties of Co–Cr–Ta perpendicular media samples grown on Si substrates at different substrate temperatures during RF-sputter deposition. In general, coercivity of Co82Cr13Ta5 samples is higher than that of Co86Cr12Ta2 samples, whereas the perpendicular c-axis orientation of Co86Cr12Ta2 samples is better. Ta content was suggested to be in between 2 and 5 at% to give optimum magnetic and structural properties.

Original language	English
Pages (from-to)	117-120
Number of pages	4
Journal	Journal of magnetism and magnetic materials
Volume	193
Issue number	1-3
DOIs	https://doi.org/10.1016/S0304-8853(98)00412-0
Publication status	Published - 1999
Event	7th International Conference of Magnetic Recording Media, MRM 1998 - Maastricht, Netherlands Duration: 30 Aug 1998 → 2 Sep 1998 Conference number: 7

Keywords

SMI-MAT: MATERIALS
SMI-TST: From 2006 in EWI-TST
Thin films
Substrate temperature
Tantalum
RF-sputtering

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10.1016/S0304-8853(98)00412-0

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title = "The influence of Tantalum content in relation to substrate temperature on magnetic and structural properties of Co-Cr-Ta thin films",

abstract = "In this study, we investigated the influence of Ta content (in Co86Cr12Ta2 and Co82Cr13Ta5 compositions) on magnetic and structural properties of Co–Cr–Ta perpendicular media samples grown on Si substrates at different substrate temperatures during RF-sputter deposition. In general, coercivity of Co82Cr13Ta5 samples is higher than that of Co86Cr12Ta2 samples, whereas the perpendicular c-axis orientation of Co86Cr12Ta2 samples is better. Ta content was suggested to be in between 2 and 5 at% to give optimum magnetic and structural properties.",

keywords = "SMI-MAT: MATERIALS, SMI-TST: From 2006 in EWI-TST, Thin films, Substrate temperature, Tantalum, RF-sputtering",

author = "Kim, {Phan Le} and Cock Lodder and Luong, {Nguyen Hoang} and Hien, {Than Duc}",

year = "1999",

doi = "10.1016/S0304-8853(98)00412-0",

language = "English",

volume = "193",

pages = "117--120",

journal = "Journal of magnetism and magnetic materials",

issn = "0304-8853",

publisher = "Elsevier",

number = "1-3",

note = "7th International Conference of Magnetic Recording Media, MRM 1998, MRM ; Conference date: 30-08-1998 Through 02-09-1998",

}

TY - JOUR

T1 - The influence of Tantalum content in relation to substrate temperature on magnetic and structural properties of Co-Cr-Ta thin films

AU - Kim, Phan Le

AU - Lodder, Cock

AU - Luong, Nguyen Hoang

AU - Hien, Than Duc

N1 - Conference code: 7

PY - 1999

Y1 - 1999

N2 - In this study, we investigated the influence of Ta content (in Co86Cr12Ta2 and Co82Cr13Ta5 compositions) on magnetic and structural properties of Co–Cr–Ta perpendicular media samples grown on Si substrates at different substrate temperatures during RF-sputter deposition. In general, coercivity of Co82Cr13Ta5 samples is higher than that of Co86Cr12Ta2 samples, whereas the perpendicular c-axis orientation of Co86Cr12Ta2 samples is better. Ta content was suggested to be in between 2 and 5 at% to give optimum magnetic and structural properties.

AB - In this study, we investigated the influence of Ta content (in Co86Cr12Ta2 and Co82Cr13Ta5 compositions) on magnetic and structural properties of Co–Cr–Ta perpendicular media samples grown on Si substrates at different substrate temperatures during RF-sputter deposition. In general, coercivity of Co82Cr13Ta5 samples is higher than that of Co86Cr12Ta2 samples, whereas the perpendicular c-axis orientation of Co86Cr12Ta2 samples is better. Ta content was suggested to be in between 2 and 5 at% to give optimum magnetic and structural properties.

KW - SMI-MAT: MATERIALS

KW - SMI-TST: From 2006 in EWI-TST

KW - Thin films

KW - Substrate temperature

KW - Tantalum

KW - RF-sputtering

U2 - 10.1016/S0304-8853(98)00412-0

DO - 10.1016/S0304-8853(98)00412-0

M3 - Article

VL - 193

SP - 117

EP - 120

JO - Journal of magnetism and magnetic materials

JF - Journal of magnetism and magnetic materials

SN - 0304-8853

IS - 1-3

T2 - 7th International Conference of Magnetic Recording Media, MRM 1998

Y2 - 30 August 1998 through 2 September 1998

ER -

The influence of Tantalum content in relation to substrate temperature on magnetic and structural properties of Co-Cr-Ta thin films

Abstract

Keywords

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