The influence of Tantalum content in relation to substrate temperature on magnetic and structural properties of Co-Cr-Ta thin films

Phan Le Kim*, Cock Lodder, Nguyen Hoang Luong, Than Duc Hien

*Corresponding author for this work

    Research output: Contribution to journalArticleAcademicpeer-review

    10 Citations (Scopus)


    In this study, we investigated the influence of Ta content (in Co86Cr12Ta2 and Co82Cr13Ta5 compositions) on magnetic and structural properties of Co–Cr–Ta perpendicular media samples grown on Si substrates at different substrate temperatures during RF-sputter deposition. In general, coercivity of Co82Cr13Ta5 samples is higher than that of Co86Cr12Ta2 samples, whereas the perpendicular c-axis orientation of Co86Cr12Ta2 samples is better. Ta content was suggested to be in between 2 and 5 at% to give optimum magnetic and structural properties.
    Original languageEnglish
    Pages (from-to)117-120
    Number of pages4
    JournalJournal of magnetism and magnetic materials
    Issue number1-3
    Publication statusPublished - 1999
    Event7th International Conference of Magnetic Recording Media, MRM 1998 - Maastricht, Netherlands
    Duration: 30 Aug 19982 Sept 1998
    Conference number: 7


    • SMI-TST: From 2006 in EWI-TST
    • Thin films
    • Substrate temperature
    • Tantalum
    • RF-sputtering

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