The influence of the chlorine hydogen ratio in the gas phase on the stability of the {113} faces of silicon in Si-H-C1 CVD

Johannes G.E. Gardeniers, M.M.W. Mooren, M.H.J.M. de Croon, L.J. Giling

Research output: Contribution to journal › Article › Academic

Keywords

@article{48ef33130b5340f9b3547f4f0f5d3975,

title = "The influence of the chlorine hydogen ratio in the gas phase on the stability of the {113} faces of silicon in Si-H-C1 CVD",

keywords = "METIS-112108",

author = "Gardeniers, {Johannes G.E.} and M.M.W. Mooren and {de Croon}, M.H.J.M. and L.J. Giling",

year = "1990",

language = "Undefined",

volume = "0",

pages = "233--244",

journal = "Crystal growth",

issn = "0144-1965",

publisher = "Plenum",

number = "102",

}

TY - JOUR

T1 - The influence of the chlorine hydogen ratio in the gas phase on the stability of the {113} faces of silicon in Si-H-C1 CVD

AU - Gardeniers, Johannes G.E.

AU - Mooren, M.M.W.

AU - de Croon, M.H.J.M.

AU - Giling, L.J.

PY - 1990

Y1 - 1990

KW - METIS-112108

M3 - Article

SN - 0144-1965

VL - 0

SP - 233

EP - 244

JO - Crystal growth

JF - Crystal growth

IS - 102

ER -