The influence of the chlorine hydogen ratio in the gas phase on the stability of the {113} faces of silicon in Si-H-C1 CVD

Johannes G.E. Gardeniers, M.M.W. Mooren, M.H.J.M. de Croon, L.J. Giling

    Research output: Contribution to journalArticleAcademic

    Original languageUndefined
    Pages (from-to)233-244
    Number of pages12
    JournalCrystal growth
    Issue number102
    Publication statusPublished - 1990


    • METIS-112108

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