The InGrid chip post-processing technology for radiation imaging

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Abstract

InGrid, the technology used to make CMOS-integrated high voltage electrodes for micropattern gaseous detectors is reviewed in this paper. It is presented in the broader context of CMOS wafer post-processing. This processing platform is briefly described, and recent highlights of this manufacturing approach are brought forward. The InGrid technology facilitates research into radiation imaging detectors with fully integrated electronics.

Original languageEnglish
JournalProceedings of Science
Volume95
DOIs
Publication statusPublished - 1 Jan 2009
Event18th Workshop on Vertex Detectors and Related Techniques, VERTEX 2009 - Veluwe, Netherlands
Duration: 13 Sep 200918 Sep 2009
Conference number: 18th
https://www.nikhef.nl/pub/conferences/Vertex2009/

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Detectors
Imaging techniques
Radiation
Processing
Electronic equipment
Electrodes
Electric potential

Cite this

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title = "The InGrid chip post-processing technology for radiation imaging",
abstract = "InGrid, the technology used to make CMOS-integrated high voltage electrodes for micropattern gaseous detectors is reviewed in this paper. It is presented in the broader context of CMOS wafer post-processing. This processing platform is briefly described, and recent highlights of this manufacturing approach are brought forward. The InGrid technology facilitates research into radiation imaging detectors with fully integrated electronics.",
author = "Jurriaan Schmitz",
year = "2009",
month = "1",
day = "1",
doi = "10.22323/1.095.0022",
language = "English",
volume = "95",
journal = "Proceedings of Science",
issn = "1824-8039",
publisher = "Sissa Medialab Srl",

}

The InGrid chip post-processing technology for radiation imaging. / Schmitz, Jurriaan.

In: Proceedings of Science, Vol. 95, 01.01.2009.

Research output: Contribution to journalConference articleAcademicpeer-review

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