The InGrid chip post-processing technology for radiation imaging

Jurriaan Schmitz*

*Corresponding author for this work

    Research output: Contribution to journalConference articleAcademicpeer-review

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    Abstract

    InGrid, the technology used to make CMOS-integrated high voltage electrodes for micropattern gaseous detectors is reviewed in this paper. It is presented in the broader context of CMOS wafer post-processing. This processing platform is briefly described, and recent highlights of this manufacturing approach are brought forward. The InGrid technology facilitates research into radiation imaging detectors with fully integrated electronics.

    Original languageEnglish
    JournalProceedings of Science
    Volume95
    DOIs
    Publication statusPublished - 1 Jan 2009
    Event18th Workshop on Vertex Detectors and Related Techniques, VERTEX 2009 - Veluwe, Netherlands
    Duration: 13 Sep 200918 Sep 2009
    Conference number: 18th
    https://www.nikhef.nl/pub/conferences/Vertex2009/

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