The mechanical properties of the rubber elastic polymer polydimethylsiloxane for sensor applications

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    Abstract

    Polydimethylsiloxane (PDMS) is a commercially available physically and chemically stable silicone rubber. It has a unique flexibility with a shear elastic modulus due to one of the lowest glass transition temperatures of any polymer . Further properties of PDMS are a low change in the shear elastic modulus versus temperature , virtually no change in G versus frequency and a high compressibility. Because of its clean room processability, its low curing temperature, its high flexibility, the possibility to change its functional groups and the very low drift of its properties with time and temperature, PDMS is very well suited for micromachined mechanical and chemical sensors, such as accelerometers (as the spring material) and ISFETs (as the ion selective membrane). It can also be used as an adhesive in wafer bonding, as a cover material in tactile sensors and as the mechanical decoupling zone in sensor packagings.
    Original languageUndefined
    Pages (from-to)145-147
    JournalJournal of micromechanics and microengineering
    Volume7
    Issue number3
    DOIs
    Publication statusPublished - 1997

    Keywords

    • METIS-111963
    • IR-61415

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