The microflown

H.E. de Bree

Research output: ThesisPhD Thesis - Research UT, graduation UT

Abstract

This thesis deals with a novel acoustic sensor, the microflown. This micromachined sensor is capable of measuring the particle velocity directly. When both particle velocity and acoustic pressure variations are known an acoustic phenomena can be fully described. The microflown is a microphone which consists of two temperature sensors and a heater. The particle velocity alters the temperature distribution and thus the temperature of both the sensors. The temperature difference of both sensors is proportional with the particle velocity.
LanguageUndefined
Awarding Institution
  • University of Twente
Supervisors/Advisors
  • Elwenspoek, Michael Curt, Supervisor
Award date7 Feb 1997
Place of PublicationEnschede
Publisher
Print ISBNs9-036-50926-2
StatePublished - 7 Feb 1997

Keywords

  • IR-61848
  • METIS-111369
  • EWI-10771

Cite this

de Bree, H. E. (1997). The microflown Enschede: Twente University Press (TUP)
de Bree, H.E.. / The microflown. Enschede : Twente University Press (TUP), 1997. 183 p.
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keywords = "IR-61848, METIS-111369, EWI-10771",
author = "{de Bree}, H.E.",
year = "1997",
month = "2",
day = "7",
language = "Undefined",
isbn = "9-036-50926-2",
publisher = "Twente University Press (TUP)",
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de Bree, HE 1997, 'The microflown', University of Twente, Enschede.

The microflown. / de Bree, H.E.

Enschede : Twente University Press (TUP), 1997. 183 p.

Research output: ThesisPhD Thesis - Research UT, graduation UT

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AU - de Bree,H.E.

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N2 - This thesis deals with a novel acoustic sensor, the microflown. This micromachined sensor is capable of measuring the particle velocity directly. When both particle velocity and acoustic pressure variations are known an acoustic phenomena can be fully described. The microflown is a microphone which consists of two temperature sensors and a heater. The particle velocity alters the temperature distribution and thus the temperature of both the sensors. The temperature difference of both sensors is proportional with the particle velocity.

AB - This thesis deals with a novel acoustic sensor, the microflown. This micromachined sensor is capable of measuring the particle velocity directly. When both particle velocity and acoustic pressure variations are known an acoustic phenomena can be fully described. The microflown is a microphone which consists of two temperature sensors and a heater. The particle velocity alters the temperature distribution and thus the temperature of both the sensors. The temperature difference of both sensors is proportional with the particle velocity.

KW - IR-61848

KW - METIS-111369

KW - EWI-10771

M3 - PhD Thesis - Research UT, graduation UT

SN - 9-036-50926-2

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de Bree HE. The microflown. Enschede: Twente University Press (TUP), 1997. 183 p.