The microflown

H.E. de Bree

    Research output: ThesisPhD Thesis - Research UT, graduation UT

    590 Downloads (Pure)

    Abstract

    This thesis deals with a novel acoustic sensor, the microflown. This micromachined sensor is capable of measuring the particle velocity directly. When both particle velocity and acoustic pressure variations are known an acoustic phenomena can be fully described. The microflown is a microphone which consists of two temperature sensors and a heater. The particle velocity alters the temperature distribution and thus the temperature of both the sensors. The temperature difference of both sensors is proportional with the particle velocity.
    Original languageUndefined
    Awarding Institution
    • University of Twente
    Supervisors/Advisors
    • Elwenspoek, Michael Curt, Supervisor
    Award date7 Feb 1997
    Place of PublicationEnschede
    Publisher
    Print ISBNs9-036-50926-2
    Publication statusPublished - 7 Feb 1997

    Keywords

    • IR-61848
    • METIS-111369
    • EWI-10771

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