The microflown, from die to product

H.E. de Bree, Michael Curt Elwenspoek

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    15 Downloads (Pure)

    Abstract

    This article reports on various steps to transform a concept to a product. A sound intensity probe based on a micro-machined acoustic sensor "the Microflown" is used as an example. Requirements for the micromachined part are simplicity and uncomplicated processing to reach a high throughput. For monitoring the quality, simple and reliable characterisation tools should be designed as well. To gain credibility independent labs should test the product. The product should offer a complete solution that competes in overall costs and performance, and it must be possible to connect it into existing systems.
    Original languageUndefined
    Title of host publicationProceedings of the 13th European Conference on solid state transducers
    Place of PublicationDen Haag
    PublisherDelft University of Technology
    Pages459-460
    ISBN (Print)9789076699011
    Publication statusPublished - 12 Sep 1999
    Event13th European Conference on Solid-State Transducers, EUROSENSORS XIII - The Hague, The Netherlands, Den Haag
    Duration: 12 Sep 199915 Sep 1999

    Publication series

    Name
    PublisherUniversity of Delft

    Conference

    Conference13th European Conference on Solid-State Transducers, EUROSENSORS XIII
    CityDen Haag
    Period12/09/9915/09/99
    OtherSeptember 12-15, 1999

    Keywords

    • Particle velocity
    • METIS-112709
    • Product
    • sound intensity
    • IR-15827

    Cite this