@inproceedings{9d1add86ef904fadb5615b1c1d68adae,
title = "The microflown, from die to product",
abstract = "This article reports on various steps to transform a concept to a product. A sound intensity probe based on a micro-machined acoustic sensor {"}the Microflown{"} is used as an example. Requirements for the micromachined part are simplicity and uncomplicated processing to reach a high throughput. For monitoring the quality, simple and reliable characterisation tools should be designed as well. To gain credibility independent labs should test the product. The product should offer a complete solution that competes in overall costs and performance, and it must be possible to connect it into existing systems.",
keywords = "Particle velocity, METIS-112709, Product, sound intensity, IR-15827",
author = "{de Bree}, H.E. and Elwenspoek, {Michael Curt}",
year = "1999",
month = sep,
day = "12",
language = "Undefined",
isbn = "9789076699011",
publisher = "Delft University of Technology",
pages = "459--460",
booktitle = "Proceedings of the 13th European Conference on solid state transducers",
address = "Netherlands",
note = "13th European Conference on Solid-State Transducers, EUROSENSORS XIII ; Conference date: 12-09-1999 Through 15-09-1999",
}