The orientation dependence of the surface morphology of silicon etched in KOH

E. van Veenendaal, J. van Suchtelen, W.J.P. van Enckevort, E. Vlieg, M. Shikida, K. Sato

Research output: Other contribution › Other research output

Keywords

@misc{2de1193fa0cd4fc4aa28f254ca3ac36d,

title = "The orientation dependence of the surface morphology of silicon etched in KOH",

keywords = "METIS-114656",

author = "{van Veenendaal}, E. and {van Suchtelen}, J. and {van Enckevort}, W.J.P. and E. Vlieg and M. Shikida and K. Sato",

year = "1999",

month = mar,

day = "15",

language = "Undefined",

type = "Other",

}