The preparation of thin alumina films by MOCVD: A short review

V.A.C. Haanappel, H.D. van Corbach, T. Fransen, P.J. Gellings

Research output: Contribution to journal › Article › Academic

Original language	Undefined
Pages (from-to)	149-158
Number of pages	10
Journal	High temperature materials and processes
Issue number	13
Publication status	Published - 1994

Keywords

@article{72350582a74a419f9393eabdc2071a57,

title = "The preparation of thin alumina films by MOCVD: A short review",

keywords = "METIS-105464",

author = "V.A.C. Haanappel and {van Corbach}, H.D. and T. Fransen and P.J. Gellings",

year = "1994",

language = "Undefined",

pages = "149--158",

journal = "High temperature materials and processes",

issn = "0334-6455",

publisher = "Walter de Gruyter",

number = "13",

}