The pyrolytic decomposition of metal alkoxides (di-acetoxy-di-t-butoxy-silane, DADBS) during chemical vapour deposition of thin oxide films

R. Hofman; R. Hofman; J.G.F. Westheim; J.G.F. Westheim; V.A.C. Haanappel; V.A.C. Haanappel; T. Fransen; P.J. Gellings

doi:10.1016/0040-6031(93)80109-N

The pyrolytic decomposition of metal alkoxides (di-acetoxy-di-t-butoxy-silane, DADBS) during chemical vapour deposition of thin oxide films

R. Hofman, R. Hofman, J.G.F. Westheim, J.G.F. Westheim, V.A.C. Haanappel, V.A.C. Haanappel, T. Fransen, P.J. Gellings

Research output: Contribution to journal › Article › Academic › peer-review

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Abstract

In this study the effects of the nature of metal alkoxides on their vapour pressures and thermal decomposition chemistry are reported. The vapour pressure and the volatility of a metal alkoxide strongly depends on the steric effect of its alkoxy group. The thermal decomposition chemistry of one metal alkoxide (di-acetoxy-di-t-butoxy-silane, DADBS) has been studied by mass spectrometry at temperatures between 423 and 923 K. The pyrolytic products were acetic acid anhydride and 2-methyl propene. The acetic acid anhydride is formed at temperatures above 473 K and 2-methyl propene is formed above 673 K by a ß -hydride elimination mechanism. In these steps, a 6-ring intermediate is supposed to be formed. The silicon acid finally remaining is proposed to react by poly-condensation to SiO2 coatings or powder.

Original language	Undefined
Pages (from-to)	329-335
Number of pages	7
Journal	Theoretica chimica acta
Volume	215
Issue number	215
DOIs	https://doi.org/10.1016/0040-6031(93)80109-N
Publication status	Published - 1993

Keywords

METIS-105450
IR-10012

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10.1016/0040-6031(93)80109-N

Hofman93pyrolytic
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Cite this

Hofman, R., Hofman, R., Westheim, J. G. F., Westheim, J. G. F., Haanappel, V. A. C., Haanappel, V. A. C., Fransen, T., & Gellings, P. J. (1993). The pyrolytic decomposition of metal alkoxides (di-acetoxy-di-t-butoxy-silane, DADBS) during chemical vapour deposition of thin oxide films. Theoretica chimica acta, 215(215), 329-335. https://doi.org/10.1016/0040-6031(93)80109-N

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abstract = "In this study the effects of the nature of metal alkoxides on their vapour pressures and thermal decomposition chemistry are reported. The vapour pressure and the volatility of a metal alkoxide strongly depends on the steric effect of its alkoxy group. The thermal decomposition chemistry of one metal alkoxide (di-acetoxy-di-t-butoxy-silane, DADBS) has been studied by mass spectrometry at temperatures between 423 and 923 K. The pyrolytic products were acetic acid anhydride and 2-methyl propene. The acetic acid anhydride is formed at temperatures above 473 K and 2-methyl propene is formed above 673 K by a {\ss} -hydride elimination mechanism. In these steps, a 6-ring intermediate is supposed to be formed. The silicon acid finally remaining is proposed to react by poly-condensation to SiO2 coatings or powder.",

keywords = "METIS-105450, IR-10012",

author = "R. Hofman and R. Hofman and J.G.F. Westheim and J.G.F. Westheim and V.A.C. Haanappel and V.A.C. Haanappel and T. Fransen and P.J. Gellings",

year = "1993",

doi = "10.1016/0040-6031(93)80109-N",

language = "Undefined",

volume = "215",

pages = "329--335",

journal = "Theoretical chemistry accounts",

issn = "1432-881X",

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number = "215",

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The pyrolytic decomposition of metal alkoxides (di-acetoxy-di-t-butoxy-silane, DADBS) during chemical vapour deposition of thin oxide films. / Hofman, R.; Hofman, R.; Westheim, J.G.F.; Westheim, J.G.F.; Haanappel, V.A.C.; Haanappel, V.A.C.; Fransen, T.; Gellings, P.J.

In: Theoretica chimica acta, Vol. 215, No. 215, 1993, p. 329-335.

Research output: Contribution to journal › Article › Academic › peer-review

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T1 - The pyrolytic decomposition of metal alkoxides (di-acetoxy-di-t-butoxy-silane, DADBS) during chemical vapour deposition of thin oxide films

AU - Hofman, R.

AU - Westheim, J.G.F.

AU - Haanappel, V.A.C.

AU - Fransen, T.

AU - Gellings, P.J.

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N2 - In this study the effects of the nature of metal alkoxides on their vapour pressures and thermal decomposition chemistry are reported. The vapour pressure and the volatility of a metal alkoxide strongly depends on the steric effect of its alkoxy group. The thermal decomposition chemistry of one metal alkoxide (di-acetoxy-di-t-butoxy-silane, DADBS) has been studied by mass spectrometry at temperatures between 423 and 923 K. The pyrolytic products were acetic acid anhydride and 2-methyl propene. The acetic acid anhydride is formed at temperatures above 473 K and 2-methyl propene is formed above 673 K by a ß -hydride elimination mechanism. In these steps, a 6-ring intermediate is supposed to be formed. The silicon acid finally remaining is proposed to react by poly-condensation to SiO2 coatings or powder.

AB - In this study the effects of the nature of metal alkoxides on their vapour pressures and thermal decomposition chemistry are reported. The vapour pressure and the volatility of a metal alkoxide strongly depends on the steric effect of its alkoxy group. The thermal decomposition chemistry of one metal alkoxide (di-acetoxy-di-t-butoxy-silane, DADBS) has been studied by mass spectrometry at temperatures between 423 and 923 K. The pyrolytic products were acetic acid anhydride and 2-methyl propene. The acetic acid anhydride is formed at temperatures above 473 K and 2-methyl propene is formed above 673 K by a ß -hydride elimination mechanism. In these steps, a 6-ring intermediate is supposed to be formed. The silicon acid finally remaining is proposed to react by poly-condensation to SiO2 coatings or powder.

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