The quality factor of micromachined silicon beam resonators

F.R. Blom, S. Bouwstra, R.M. de Vink, J.H.J. Fluitman, M. Elwenspoek, Th.J.A. Popma, T.S.J. Lammerink

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    Original languageEnglish
    Title of host publicationEurosensors II, Enschede, The Netherlands
    Subtitle of host publicationTechnical Digest
    Place of PublicationEnschede
    PublisherUniversity of Twente
    Publication statusPublished - 1988
    Event4th Symposium on Sensors and Actuators, Eurosensors II 1988 - University of Twente, Enschede, Netherlands
    Duration: 2 Nov 19884 Nov 1988
    Conference number: 4

    Conference

    Conference4th Symposium on Sensors and Actuators, Eurosensors II 1988
    Abbreviated titleEurosensors
    CountryNetherlands
    CityEnschede
    Period2/11/884/11/88

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