The realization of an integrated Mach-Zehnder waveguide immunosensor in silicon technology

E.F. Schipper; A.M. Brugman; C. Dominguez; L.M. Lechuga; R.P.H. Kooyman; J. Greve

doi:10.1016/S0925-4005(97)80254-7

The realization of an integrated Mach-Zehnder waveguide immunosensor in silicon technology

E.F. Schipper
, A.M. Brugman
, C. Dominguez
, L.M. Lechuga
, R.P.H. Kooyman
, J. Greve

Research output: Contribution to journal › Article › Academic › peer-review

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335 Downloads (Pure)

Abstract

We describe the realization of a symmetric integrated channel waveguide Mach-Zehnder sensor which uses the evanescent field to detect small refractive-index changes (Δn_min ≈ 1 × 10⁻⁴) near the guiding-layer surface. This guiding layer consists of ridge structures with a height of 3 nm and a width of 4 μm made in Si₃N₄. This layer has a thickness of 100 nm. The sensor device has been tested with glucose solutions of different bulk refractive indices. Results of a slab-model calculation are in good agreement with obtained experimental results. The feasibility of applying this sensor for immunosensing, detecting directly the binding of antigen to an antibody receptor surface, is shown with antibody-antigen binding experiments.

Original language	English
Pages (from-to)	147-153
Number of pages	7
Journal	Sensors and Actuators B: Chemical
Volume	40
Issue number	2-3
DOIs	https://doi.org/10.1016/S0925-4005(97)80254-7
Publication status	Published - 1997

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title = "The realization of an integrated Mach-Zehnder waveguide immunosensor in silicon technology",

abstract = "We describe the realization of a symmetric integrated channel waveguide Mach-Zehnder sensor which uses the evanescent field to detect small refractive-index changes (Δnmin ≈ 1 {\texttimes} 10−4) near the guiding-layer surface. This guiding layer consists of ridge structures with a height of 3 nm and a width of 4 μm made in Si3N4. This layer has a thickness of 100 nm. The sensor device has been tested with glucose solutions of different bulk refractive indices. Results of a slab-model calculation are in good agreement with obtained experimental results. The feasibility of applying this sensor for immunosensing, detecting directly the binding of antigen to an antibody receptor surface, is shown with antibody-antigen binding experiments.",

author = "E.F. Schipper and A.M. Brugman and C. Dominguez and L.M. Lechuga and R.P.H. Kooyman and J. Greve",

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AU - Schipper, E.F.

AU - Brugman, A.M.

AU - Dominguez, C.

AU - Lechuga, L.M.

AU - Kooyman, R.P.H.

AU - Greve, J.

PY - 1997

Y1 - 1997

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AB - We describe the realization of a symmetric integrated channel waveguide Mach-Zehnder sensor which uses the evanescent field to detect small refractive-index changes (Δnmin ≈ 1 × 10−4) near the guiding-layer surface. This guiding layer consists of ridge structures with a height of 3 nm and a width of 4 μm made in Si3N4. This layer has a thickness of 100 nm. The sensor device has been tested with glucose solutions of different bulk refractive indices. Results of a slab-model calculation are in good agreement with obtained experimental results. The feasibility of applying this sensor for immunosensing, detecting directly the binding of antigen to an antibody receptor surface, is shown with antibody-antigen binding experiments.

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JO - Sensors and Actuators B: Chemical

JF - Sensors and Actuators B: Chemical

IS - 2-3

ER -

The realization of an integrated Mach-Zehnder waveguide immunosensor in silicon technology

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