The release of sub-micron perforated membranes by wet and dry etching

S. Kuiper, Meint J. de Boer, C.J.M. van Rijn, W. Nijdam, Gijsbertus J.M. Krijnen, Michael Curt Elwenspoek

    Research output: Other contributionOther research output

    Original languageUndefined
    Place of PublicationEnschede
    Publication statusPublished - 14 Oct 1999

    Keywords

    • METIS-114675

    Cite this

    Kuiper, S., de Boer, M. J., van Rijn, C. J. M., Nijdam, W., Krijnen, G. J. M., & Elwenspoek, M. C. (1999, Oct 14). The release of sub-micron perforated membranes by wet and dry etching. Enschede.