The release of sub-micron perforated membranes by wet and dry etching

S. Kuiper, Meint J. de Boer, C.J.M. van Rijn, W. Nijdam, Gijsbertus J.M. Krijnen, Michael Curt Elwenspoek

Research output: Other contribution › Other research output

Keywords

@misc{60ba48fb2d8143bcb221e4428dbf9c16,

title = "The release of sub-micron perforated membranes by wet and dry etching",

keywords = "METIS-114675",

author = "S. Kuiper and {de Boer}, {Meint J.} and {van Rijn}, C.J.M. and W. Nijdam and Krijnen, {Gijsbertus J.M.} and Elwenspoek, {Michael Curt}",

year = "1999",

month = oct,

day = "14",

language = "Undefined",

type = "Other",

}