The release of sub-micron perforated membranes by wet and dry etching

S. Kuiper, Meint J. de Boer, C.J.M. van Rijn, W. Nijdam, Gijsbertus J.M. Krijnen, Michael Curt Elwenspoek

    Research output: Other contributionOther research output

    Original languageUndefined
    Place of PublicationEnschede
    Publication statusPublished - 14 Oct 1999

    Keywords

    • METIS-114675

    Cite this

    Kuiper, S., de Boer, M. J., van Rijn, C. J. M., Nijdam, W., Krijnen, G. J. M., & Elwenspoek, M. C. (1999, Oct 14). The release of sub-micron perforated membranes by wet and dry etching. Enschede.
    Kuiper, S. ; de Boer, Meint J. ; van Rijn, C.J.M. ; Nijdam, W. ; Krijnen, Gijsbertus J.M. ; Elwenspoek, Michael Curt. / The release of sub-micron perforated membranes by wet and dry etching. 1999. Enschede.
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    title = "The release of sub-micron perforated membranes by wet and dry etching",
    keywords = "METIS-114675",
    author = "S. Kuiper and {de Boer}, {Meint J.} and {van Rijn}, C.J.M. and W. Nijdam and Krijnen, {Gijsbertus J.M.} and Elwenspoek, {Michael Curt}",
    year = "1999",
    month = "10",
    day = "14",
    language = "Undefined",
    type = "Other",

    }

    The release of sub-micron perforated membranes by wet and dry etching. / Kuiper, S.; de Boer, Meint J.; van Rijn, C.J.M.; Nijdam, W.; Krijnen, Gijsbertus J.M.; Elwenspoek, Michael Curt.

    Enschede. 1999, .

    Research output: Other contributionOther research output

    TY - GEN

    T1 - The release of sub-micron perforated membranes by wet and dry etching

    AU - Kuiper, S.

    AU - de Boer, Meint J.

    AU - van Rijn, C.J.M.

    AU - Nijdam, W.

    AU - Krijnen, Gijsbertus J.M.

    AU - Elwenspoek, Michael Curt

    PY - 1999/10/14

    Y1 - 1999/10/14

    KW - METIS-114675

    M3 - Other contribution

    CY - Enschede

    ER -