The release of sub-micron perforated membranes by wet and dry etching

S. Kuiper; Meint J. de Boer; C.J.M. van Rijn; W. Nijdam; Gijsbertus J.M. Krijnen; Michael Curt Elwenspoek

The release of sub-micron perforated membranes by wet and dry etching

S. Kuiper
, Meint J. de Boer
, C.J.M. van Rijn
, W. Nijdam
, Gijsbertus J.M. Krijnen
, Michael Curt Elwenspoek

Research output: Other contribution › Other research output

Original language	Undefined
Place of Publication	Enschede
Publication status	Published - 14 Oct 1999

Keywords

METIS-114675

Cite this

@misc{60ba48fb2d8143bcb221e4428dbf9c16,

title = "The release of sub-micron perforated membranes by wet and dry etching",

keywords = "METIS-114675",

author = "S. Kuiper and \{de Boer\}, \{Meint J.\} and \{van Rijn\}, C.J.M. and W. Nijdam and Krijnen, \{Gijsbertus J.M.\} and Elwenspoek, \{Michael Curt\}",

year = "1999",

month = oct,

day = "14",

language = "Undefined",

type = "Other",

}