The rubberelastic polymer polydimethylsiloxane applied as spring material in micromechanical sensors

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    Original languageUndefined
    Title of host publicationMicro system Technologies
    Place of PublicationPotsdam, Germany
    Pages73-78
    Publication statusPublished - 17 Sep 1996

    Keywords

    • METIS-113750

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