The rubberelastic polymer polydimethylsiloxane applied as spring material in micromechanical sensors

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

Keywords

@inproceedings{3d12d4c580c04936bafadd27ef14cde1,

title = "The rubberelastic polymer polydimethylsiloxane applied as spring material in micromechanical sensors",

keywords = "METIS-113750",

author = "L{\"o}tters, \{Joost Conrad\} and Wouter Olthuis and Veltink, \{Petrus H.\} and Piet Bergveld",

year = "1996",

month = sep,

day = "17",

language = "Undefined",

pages = "73--78",

booktitle = "Micro system Technologies",

}