The simultanous measurement of firction and topography at extremely thin films

H. Visscher, P.J. Grundy, Dirk J. Schipper

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

Original language	Undefined
Title of host publication	Proceedings 18th International IRG-OECD conference
Place of Publication	Amsterdam
Pages	II.1-7
Publication status	Published - 8 Feb 1994

Keywords

@inproceedings{e2fde791eca6441098b18aa31afc40a4,

title = "The simultanous measurement of firction and topography at extremely thin films",

keywords = "METIS-145638",

author = "H. Visscher and P.J. Grundy and Schipper, {Dirk J.}",

year = "1994",

month = feb,

day = "8",

language = "Undefined",

pages = "II.1--7",

booktitle = "Proceedings 18th International IRG-OECD conference",

}