The simultanous measurement of firction and topography at extremely thin films

H. Visscher, P.J. Grundy, Dirk J. Schipper

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    10 Citations (Scopus)
    Original languageUndefined
    Title of host publicationProceedings 18th International IRG-OECD conference
    Place of PublicationAmsterdam
    PagesII.1-7
    Publication statusPublished - 8 Feb 1994

    Keywords

    • METIS-145638

    Cite this

    Visscher, H., Grundy, P. J., & Schipper, D. J. (1994). The simultanous measurement of firction and topography at extremely thin films. In Proceedings 18th International IRG-OECD conference (pp. II.1-7). Amsterdam.