The trade-off between tuning ratio and quality factor of BaxSr1-xTiO3 MIM capacitors on alumina substrates

M.P.J. Tiggelman, K. Reimann, J. Liu, M. Klee, R. Mauczok, W. Keur, Jurriaan Schmitz, Raymond Josephus Engelbart Hueting

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review


    Barium strontium titanate with different compositions is deposited using wet-chemical processing on a glass planarization layer, on top of alumina substrates. Three samples were fabricated with BaxSr1-xTiO3 (BST) with the barium content x varying between 0.8 and 1. The poly-crystalline films are 530 ± 12 nm thick. The optimization in terms of permittivity and quality factor is explored for barium strontium titanate on alumina substrates. The trade-off between the permittivity and quality factor (at 1 GHz) is investigated. Our results show that wet-chemical processing on glass-planarized alumina results in a quality factor between 21–27 at 1 GHz and a tuning ratio from 1.8 to 2.0 at an electric field of 0.4 MV/cm.
    Original languageUndefined
    Title of host publicationProceedings of the 11th annual workshop on semiconductor advances for future electronics and sensors (SAFE 2008)
    Place of PublicationUtrecht, The Netherlands
    Number of pages3
    ISBN (Print)978-90-73461-56-7
    Publication statusPublished - 27 Nov 2008
    Event11th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors, SAFE 2008 - Veldhoven, Netherlands
    Duration: 27 Nov 200828 Nov 2008
    Conference number: 11

    Publication series

    PublisherTechnology Foundation STW


    Workshop11th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors, SAFE 2008
    Abbreviated titleSAFE


    • EWI-14615
    • METIS-255006
    • IR-62614
    • SC-ICF: Integrated Circuit Fabrication

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