Barium strontium titanate with different compositions is deposited using wet-chemical processing on a glass planarization layer, on top of alumina substrates. Three samples were fabricated with BaxSr1-xTiO3 (BST) with the barium content x varying between 0.8 and 1. The poly-crystalline films are 530 ± 12 nm thick. The optimization in terms of permittivity and quality factor is explored for barium strontium titanate on alumina substrates. The trade-off between the permittivity and quality factor (at 1 GHz) is investigated. Our results show that wet-chemical processing on glass-planarized alumina results in a quality factor between 21–27 at 1 GHz and a tuning ratio from 1.8 to 2.0 at an electric field of 0.4 MV/cm.
|Title of host publication||Proceedings of the 11th annual workshop on semiconductor advances for future electronics and sensors (SAFE 2008)|
|Place of Publication||Utrecht, The Netherlands|
|Number of pages||3|
|Publication status||Published - 27 Nov 2008|
|Event||11th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors, SAFE 2008 - Veldhoven, Netherlands|
Duration: 27 Nov 2008 → 28 Nov 2008
Conference number: 11
|Publisher||Technology Foundation STW|
|Workshop||11th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors, SAFE 2008|
|Period||27/11/08 → 28/11/08|
- SC-ICF: Integrated Circuit Fabrication
Tiggelman, M. P. J., Reimann, K., Liu, J., Klee, M., Mauczok, R., Keur, W., ... Hueting, R. J. E. (2008). The trade-off between tuning ratio and quality factor of BaxSr1-xTiO3 MIM capacitors on alumina substrates. In Proceedings of the 11th annual workshop on semiconductor advances for future electronics and sensors (SAFE 2008) (pp. 506-508). Utrecht, The Netherlands: STW.