The trade-off between tuning ratio and quality factor of BaxSr1-xTiO3 MIM capacitors on alumina substrates

M.P.J. Tiggelman, K. Reimann, J. Liu, M. Klee, R. Mauczok, W. Keur, Jurriaan Schmitz, Raymond Josephus Engelbart Hueting

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    Abstract

    Barium strontium titanate with different compositions is deposited using wet-chemical processing on a glass planarization layer, on top of alumina substrates. Three samples were fabricated with BaxSr1-xTiO3 (BST) with the barium content x varying between 0.8 and 1. The poly-crystalline films are 530 ± 12 nm thick. The optimization in terms of permittivity and quality factor is explored for barium strontium titanate on alumina substrates. The trade-off between the permittivity and quality factor (at 1 GHz) is investigated. Our results show that wet-chemical processing on glass-planarized alumina results in a quality factor between 21–27 at 1 GHz and a tuning ratio from 1.8 to 2.0 at an electric field of 0.4 MV/cm.
    Original languageUndefined
    Title of host publicationProceedings of the 11th annual workshop on semiconductor advances for future electronics and sensors (SAFE 2008)
    Place of PublicationUtrecht, The Netherlands
    PublisherSTW
    Pages506-508
    Number of pages3
    ISBN (Print)978-90-73461-56-7
    Publication statusPublished - 27 Nov 2008
    Event11th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors, SAFE 2008 - Veldhoven, Netherlands
    Duration: 27 Nov 200828 Nov 2008
    Conference number: 11

    Publication series

    Name
    PublisherTechnology Foundation STW
    NumberWoTUG-31

    Workshop

    Workshop11th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors, SAFE 2008
    Abbreviated titleSAFE
    CountryNetherlands
    CityVeldhoven
    Period27/11/0828/11/08

    Keywords

    • EWI-14615
    • METIS-255006
    • IR-62614
    • SC-ICF: Integrated Circuit Fabrication

    Cite this

    Tiggelman, M. P. J., Reimann, K., Liu, J., Klee, M., Mauczok, R., Keur, W., ... Hueting, R. J. E. (2008). The trade-off between tuning ratio and quality factor of BaxSr1-xTiO3 MIM capacitors on alumina substrates. In Proceedings of the 11th annual workshop on semiconductor advances for future electronics and sensors (SAFE 2008) (pp. 506-508). Utrecht, The Netherlands: STW.
    Tiggelman, M.P.J. ; Reimann, K. ; Liu, J. ; Klee, M. ; Mauczok, R. ; Keur, W. ; Schmitz, Jurriaan ; Hueting, Raymond Josephus Engelbart. / The trade-off between tuning ratio and quality factor of BaxSr1-xTiO3 MIM capacitors on alumina substrates. Proceedings of the 11th annual workshop on semiconductor advances for future electronics and sensors (SAFE 2008). Utrecht, The Netherlands : STW, 2008. pp. 506-508
    @inproceedings{e09c5beeca9e42bf91080ba7026cef68,
    title = "The trade-off between tuning ratio and quality factor of BaxSr1-xTiO3 MIM capacitors on alumina substrates",
    abstract = "Barium strontium titanate with different compositions is deposited using wet-chemical processing on a glass planarization layer, on top of alumina substrates. Three samples were fabricated with BaxSr1-xTiO3 (BST) with the barium content x varying between 0.8 and 1. The poly-crystalline films are 530 ± 12 nm thick. The optimization in terms of permittivity and quality factor is explored for barium strontium titanate on alumina substrates. The trade-off between the permittivity and quality factor (at 1 GHz) is investigated. Our results show that wet-chemical processing on glass-planarized alumina results in a quality factor between 21–27 at 1 GHz and a tuning ratio from 1.8 to 2.0 at an electric field of 0.4 MV/cm.",
    keywords = "EWI-14615, METIS-255006, IR-62614, SC-ICF: Integrated Circuit Fabrication",
    author = "M.P.J. Tiggelman and K. Reimann and J. Liu and M. Klee and R. Mauczok and W. Keur and Jurriaan Schmitz and Hueting, {Raymond Josephus Engelbart}",
    year = "2008",
    month = "11",
    day = "27",
    language = "Undefined",
    isbn = "978-90-73461-56-7",
    publisher = "STW",
    number = "WoTUG-31",
    pages = "506--508",
    booktitle = "Proceedings of the 11th annual workshop on semiconductor advances for future electronics and sensors (SAFE 2008)",

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    Tiggelman, MPJ, Reimann, K, Liu, J, Klee, M, Mauczok, R, Keur, W, Schmitz, J & Hueting, RJE 2008, The trade-off between tuning ratio and quality factor of BaxSr1-xTiO3 MIM capacitors on alumina substrates. in Proceedings of the 11th annual workshop on semiconductor advances for future electronics and sensors (SAFE 2008). STW, Utrecht, The Netherlands, pp. 506-508, 11th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors, SAFE 2008, Veldhoven, Netherlands, 27/11/08.

    The trade-off between tuning ratio and quality factor of BaxSr1-xTiO3 MIM capacitors on alumina substrates. / Tiggelman, M.P.J.; Reimann, K.; Liu, J.; Klee, M.; Mauczok, R.; Keur, W.; Schmitz, Jurriaan; Hueting, Raymond Josephus Engelbart.

    Proceedings of the 11th annual workshop on semiconductor advances for future electronics and sensors (SAFE 2008). Utrecht, The Netherlands : STW, 2008. p. 506-508.

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    TY - GEN

    T1 - The trade-off between tuning ratio and quality factor of BaxSr1-xTiO3 MIM capacitors on alumina substrates

    AU - Tiggelman, M.P.J.

    AU - Reimann, K.

    AU - Liu, J.

    AU - Klee, M.

    AU - Mauczok, R.

    AU - Keur, W.

    AU - Schmitz, Jurriaan

    AU - Hueting, Raymond Josephus Engelbart

    PY - 2008/11/27

    Y1 - 2008/11/27

    N2 - Barium strontium titanate with different compositions is deposited using wet-chemical processing on a glass planarization layer, on top of alumina substrates. Three samples were fabricated with BaxSr1-xTiO3 (BST) with the barium content x varying between 0.8 and 1. The poly-crystalline films are 530 ± 12 nm thick. The optimization in terms of permittivity and quality factor is explored for barium strontium titanate on alumina substrates. The trade-off between the permittivity and quality factor (at 1 GHz) is investigated. Our results show that wet-chemical processing on glass-planarized alumina results in a quality factor between 21–27 at 1 GHz and a tuning ratio from 1.8 to 2.0 at an electric field of 0.4 MV/cm.

    AB - Barium strontium titanate with different compositions is deposited using wet-chemical processing on a glass planarization layer, on top of alumina substrates. Three samples were fabricated with BaxSr1-xTiO3 (BST) with the barium content x varying between 0.8 and 1. The poly-crystalline films are 530 ± 12 nm thick. The optimization in terms of permittivity and quality factor is explored for barium strontium titanate on alumina substrates. The trade-off between the permittivity and quality factor (at 1 GHz) is investigated. Our results show that wet-chemical processing on glass-planarized alumina results in a quality factor between 21–27 at 1 GHz and a tuning ratio from 1.8 to 2.0 at an electric field of 0.4 MV/cm.

    KW - EWI-14615

    KW - METIS-255006

    KW - IR-62614

    KW - SC-ICF: Integrated Circuit Fabrication

    M3 - Conference contribution

    SN - 978-90-73461-56-7

    SP - 506

    EP - 508

    BT - Proceedings of the 11th annual workshop on semiconductor advances for future electronics and sensors (SAFE 2008)

    PB - STW

    CY - Utrecht, The Netherlands

    ER -

    Tiggelman MPJ, Reimann K, Liu J, Klee M, Mauczok R, Keur W et al. The trade-off between tuning ratio and quality factor of BaxSr1-xTiO3 MIM capacitors on alumina substrates. In Proceedings of the 11th annual workshop on semiconductor advances for future electronics and sensors (SAFE 2008). Utrecht, The Netherlands: STW. 2008. p. 506-508