A novel flow sensing principle will be presented which combines the advantages of both the anemometer and the mass flow sensor. The sensor consists of two elements which are used as both sensor and heater. For small flows a qualitative model of sensitivity and frequency response as well as measurements will be presented.
|Title of host publication||Proceedings Eurosensors X|
|Place of Publication||Leuven, Belgium|
|Number of pages||4|
|Publication status||Published - 8 Sep 1996|
|Event||10th European Conference on Solid-State Transducers, Eurosensors X - Leuven, Belgium|
Duration: 8 Sep 1996 → 11 Sep 1996
Conference number: 10
|Conference||10th European Conference on Solid-State Transducers, Eurosensors X|
|Period||8/09/96 → 11/09/96|
de Bree, H. E., Leussink, P. J., Korthorst, M. T., & Elwenspoek, M. C. (1996). The two sensor microflown, an improved flow sensing principle. In Proceedings Eurosensors X (pp. 1301-1304). Leuven, Belgium.