The two sensor microflown, an improved flow sensing principle

H.E. de Bree, P.J. Leussink, M.T. Korthorst, Michael Curt Elwenspoek

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    Abstract

    A novel flow sensing principle will be presented which combines the advantages of both the anemometer and the mass flow sensor. The sensor consists of two elements which are used as both sensor and heater. For small flows a qualitative model of sensitivity and frequency response as well as measurements will be presented.
    Original languageUndefined
    Title of host publicationProceedings Eurosensors X
    Place of PublicationLeuven, Belgium
    Pages1301-1304
    Number of pages4
    Publication statusPublished - 8 Sep 1996
    Event10th European Conference on Solid-State Transducers, Eurosensors X - Leuven, Belgium
    Duration: 8 Sep 199611 Sep 1996
    Conference number: 10

    Conference

    Conference10th European Conference on Solid-State Transducers, Eurosensors X
    Abbreviated titleEurosensors
    CountryBelgium
    CityLeuven
    Period8/09/9611/09/96

    Keywords

    • METIS-112897
    • IR-16015

    Cite this

    de Bree, H. E., Leussink, P. J., Korthorst, M. T., & Elwenspoek, M. C. (1996). The two sensor microflown, an improved flow sensing principle. In Proceedings Eurosensors X (pp. 1301-1304). Leuven, Belgium.