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The vacuum wafer bonding technique as an alternative method for the fabrication of metal/semiconductor heterostructures

  • K. Dessein
  • , P.S. Anil Kumar
  • , S. Nemeth
  • , L. Delaey
  • , G. Borghs
  • , J. De Boeck

    Research output: Contribution to journalArticleAcademicpeer-review

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