Theory, technology and assembly of a highly symmetrical capacitive triaxial accelerometer

Joost Conrad Lötters; Wouter Olthuis; Petrus H. Veltink; Piet Bergveld

doi:10.1109/MEMSYS.1997.581760

Theory, technology and assembly of a highly symmetrical capacitive triaxial accelerometer

Joost Conrad Lötters, Wouter Olthuis, Petrus H. Veltink, Piet Bergveld

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

7 Citations (Scopus)

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Abstract

A highly symmetrical cubic easy-to-assemble capacitive triaxial accelerometer for biomedical applications has been designed, realized and tested. The outer dimensions of the sensor are 5×5×5 mm 3 and the device is mounted on a standard IC package. New aspects of the sensor are an easy assembly procedure, the use of the polymers polydimethylsiloxane (PDMS) as spring material between the capacitor plates and the mass and polyimide (PI) as flexible interconnection layer between the capacitor plates, and the highly symmetrical cubic structure. The mathematical model, technology and assembly procedure of the sensor are described. The measurement results show a good linearity in the output voltage for accelerations up to at least 5 g and a bandwidth of DC >50 Hz. In the x-axis the sensitivity was found to be 175 mV/g which is in good correspondence with the theory. The sensitivity can be increased when the PDMS layer is patterned, which was shown in previous versions of the highly symmetrical triaxial accelerometer

Original language	English
Title of host publication	MEMS '97
Place of Publication	Nagoya, Japan
Publisher	IEEE
Pages	31-36
ISBN (Print)	0780337441
DOIs	https://doi.org/10.1109/MEMSYS.1997.581760
Publication status	Published - 26 Jan 1997
Event	10th Annual International Workshop on Micro Electro Mechanical Systems, MEMS 1997 - Nagoya, Japan Duration: 26 Jan 1997 → 30 Jan 1997 Conference number: 10

Publication series

Name
Publisher	IEEE

Workshop

Workshop	10th Annual International Workshop on Micro Electro Mechanical Systems, MEMS 1997
Abbreviated title	MEMS
Country/Territory	Japan
City	Nagoya
Period	26/01/97 → 30/01/97

Keywords

METIS-113767
IR-16882

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10.1109/MEMSYS.1997.581760

00581760

Cite this

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title = "Theory, technology and assembly of a highly symmetrical capacitive triaxial accelerometer",

abstract = "A highly symmetrical cubic easy-to-assemble capacitive triaxial accelerometer for biomedical applications has been designed, realized and tested. The outer dimensions of the sensor are 5×5×5 mm 3 and the device is mounted on a standard IC package. New aspects of the sensor are an easy assembly procedure, the use of the polymers polydimethylsiloxane (PDMS) as spring material between the capacitor plates and the mass and polyimide (PI) as flexible interconnection layer between the capacitor plates, and the highly symmetrical cubic structure. The mathematical model, technology and assembly procedure of the sensor are described. The measurement results show a good linearity in the output voltage for accelerations up to at least 5 g and a bandwidth of DC >50 Hz. In the x-axis the sensitivity was found to be 175 mV/g which is in good correspondence with the theory. The sensitivity can be increased when the PDMS layer is patterned, which was shown in previous versions of the highly symmetrical triaxial accelerometer",

keywords = "METIS-113767, IR-16882",

author = "L{\"o}tters, {Joost Conrad} and Wouter Olthuis and Veltink, {Petrus H.} and Piet Bergveld",

year = "1997",

month = jan,

day = "26",

doi = "10.1109/MEMSYS.1997.581760",

language = "English",

isbn = "0780337441",

publisher = "IEEE",

pages = "31--36",

booktitle = "MEMS '97",

address = "United States",

note = "10th Annual International Workshop on Micro Electro Mechanical Systems, MEMS 1997, MEMS ; Conference date: 26-01-1997 Through 30-01-1997",

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TY - GEN

T1 - Theory, technology and assembly of a highly symmetrical capacitive triaxial accelerometer

AU - Lötters, Joost Conrad

AU - Olthuis, Wouter

AU - Veltink, Petrus H.

AU - Bergveld, Piet

N1 - Conference code: 10

PY - 1997/1/26

Y1 - 1997/1/26

N2 - A highly symmetrical cubic easy-to-assemble capacitive triaxial accelerometer for biomedical applications has been designed, realized and tested. The outer dimensions of the sensor are 5×5×5 mm 3 and the device is mounted on a standard IC package. New aspects of the sensor are an easy assembly procedure, the use of the polymers polydimethylsiloxane (PDMS) as spring material between the capacitor plates and the mass and polyimide (PI) as flexible interconnection layer between the capacitor plates, and the highly symmetrical cubic structure. The mathematical model, technology and assembly procedure of the sensor are described. The measurement results show a good linearity in the output voltage for accelerations up to at least 5 g and a bandwidth of DC >50 Hz. In the x-axis the sensitivity was found to be 175 mV/g which is in good correspondence with the theory. The sensitivity can be increased when the PDMS layer is patterned, which was shown in previous versions of the highly symmetrical triaxial accelerometer

AB - A highly symmetrical cubic easy-to-assemble capacitive triaxial accelerometer for biomedical applications has been designed, realized and tested. The outer dimensions of the sensor are 5×5×5 mm 3 and the device is mounted on a standard IC package. New aspects of the sensor are an easy assembly procedure, the use of the polymers polydimethylsiloxane (PDMS) as spring material between the capacitor plates and the mass and polyimide (PI) as flexible interconnection layer between the capacitor plates, and the highly symmetrical cubic structure. The mathematical model, technology and assembly procedure of the sensor are described. The measurement results show a good linearity in the output voltage for accelerations up to at least 5 g and a bandwidth of DC >50 Hz. In the x-axis the sensitivity was found to be 175 mV/g which is in good correspondence with the theory. The sensitivity can be increased when the PDMS layer is patterned, which was shown in previous versions of the highly symmetrical triaxial accelerometer

KW - METIS-113767

KW - IR-16882

U2 - 10.1109/MEMSYS.1997.581760

DO - 10.1109/MEMSYS.1997.581760

M3 - Conference contribution

SN - 0780337441

SP - 31

EP - 36

BT - MEMS '97

PB - IEEE

CY - Nagoya, Japan

T2 - 10th Annual International Workshop on Micro Electro Mechanical Systems, MEMS 1997

Y2 - 26 January 1997 through 30 January 1997

ER -

Theory, technology and assembly of a highly symmetrical capacitive triaxial accelerometer

Abstract

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Keywords

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