Thermal actuation of clamped silicon microbeans

Theodorus S.J. Lammerink, Michael Curt Elwenspoek, J.H.J. Fluitman

    Research output: Contribution to journalArticleAcademicpeer-review

    Original languageUndefined
    Pages (from-to)217-238
    Number of pages21
    JournalSensors and materials
    Issue number3,4
    Publication statusPublished - 1992


    • METIS-112116
    • IR-15241

    Cite this

    Lammerink, T. S. J., Elwenspoek, M. C., & Fluitman, J. H. J. (1992). Thermal actuation of clamped silicon microbeans. Sensors and materials, 0(3,4), 217-238.