Thermal actuation of clamped silicon microbeans

Theodorus S.J. Lammerink, Michael Curt Elwenspoek, J.H.J. Fluitman

Research output: Contribution to journal › Article › Academic › peer-review

Keywords

@article{d85ad61df6fc436aab7742a821ac6255,

title = "Thermal actuation of clamped silicon microbeans",

keywords = "METIS-112116, IR-15241",

author = "Lammerink, {Theodorus S.J.} and Elwenspoek, {Michael Curt} and J.H.J. Fluitman",

year = "1992",

language = "Undefined",

volume = "0",

pages = "217--238",

journal = "Sensors and materials",

issn = "0914-4935",

publisher = "M Y U Scientific Publishing Division",

number = "3,4",

}