Thermal and radical enhanced atomic layer deposition of films containing boron, nitrogen and carbon

Ramazan Oguzhan Apaydin

    Research output: ThesisPhD Thesis - Research UT, graduation UT

    65 Downloads (Pure)

    Fingerprint

    Dive into the research topics of 'Thermal and radical enhanced atomic layer deposition of films containing boron, nitrogen and carbon'. Together they form a unique fingerprint.

    Physics & Astronomy