Thermal base drive for micromechanical resonators employing deep-diffusion bases

S. Bouwstra; Jeroen van Rooijen; H.A.C. Tilmans; Arjun Selvakumar; Khahl Najafi

doi:10.1016/0924-4247(93)80009-6

Thermal base drive for micromechanical resonators employing deep-diffusion bases

S. Bouwstra, Jeroen van Rooijen, H.A.C. Tilmans, Arjun Selvakumar, Khahl Najafi

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Abstract

A novel approach of thermal excitation is presented, where thin micromechanical structures are suspended by deep-diffusion bases. Cantilevers and microbridges are fabricated, modeled and tested. Resonance frequencies are solely determined by the thin parts of the structures, and are independent of material properties and dimensions of the base. The efficiency for the amplitude of vibration is independent of the thickness and length of the base. Therefore short and thick bases can be applied, leading to relatively small temperature elevations inherent to thermal excitation.

Original language	English
Pages (from-to)	38-44
Journal	Sensors and Actuators A: Physical
Volume	37-38
Issue number	37
DOIs	https://doi.org/10.1016/0924-4247(93)80009-6
Publication status	Published - 1993
Event	Eurosensors VI - San Sebastian, Spain Duration: 5 Oct 1992 → 7 Oct 1992 Conference number: 6

Keywords

METIS-129001
IR-24201

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10.1016/0924-4247(93)80009-6

Bouwstra93thermalFinal published version, 688 KB

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title = "Thermal base drive for micromechanical resonators employing deep-diffusion bases",

abstract = "A novel approach of thermal excitation is presented, where thin micromechanical structures are suspended by deep-diffusion bases. Cantilevers and microbridges are fabricated, modeled and tested. Resonance frequencies are solely determined by the thin parts of the structures, and are independent of material properties and dimensions of the base. The efficiency for the amplitude of vibration is independent of the thickness and length of the base. Therefore short and thick bases can be applied, leading to relatively small temperature elevations inherent to thermal excitation.",

keywords = "METIS-129001, IR-24201",

author = "S. Bouwstra and {van Rooijen}, Jeroen and H.A.C. Tilmans and Arjun Selvakumar and Khahl Najafi",

year = "1993",

doi = "10.1016/0924-4247(93)80009-6",

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T1 - Thermal base drive for micromechanical resonators employing deep-diffusion bases

AU - Bouwstra, S.

AU - van Rooijen, Jeroen

AU - Tilmans, H.A.C.

AU - Selvakumar, Arjun

AU - Najafi, Khahl

N1 - Conference code: 6

PY - 1993

Y1 - 1993

N2 - A novel approach of thermal excitation is presented, where thin micromechanical structures are suspended by deep-diffusion bases. Cantilevers and microbridges are fabricated, modeled and tested. Resonance frequencies are solely determined by the thin parts of the structures, and are independent of material properties and dimensions of the base. The efficiency for the amplitude of vibration is independent of the thickness and length of the base. Therefore short and thick bases can be applied, leading to relatively small temperature elevations inherent to thermal excitation.

AB - A novel approach of thermal excitation is presented, where thin micromechanical structures are suspended by deep-diffusion bases. Cantilevers and microbridges are fabricated, modeled and tested. Resonance frequencies are solely determined by the thin parts of the structures, and are independent of material properties and dimensions of the base. The efficiency for the amplitude of vibration is independent of the thickness and length of the base. Therefore short and thick bases can be applied, leading to relatively small temperature elevations inherent to thermal excitation.

KW - METIS-129001

KW - IR-24201

U2 - 10.1016/0924-4247(93)80009-6

DO - 10.1016/0924-4247(93)80009-6

M3 - Article

SN - 0924-4247

VL - 37-38

SP - 38

EP - 44

JO - Sensors and Actuators A: Physical

JF - Sensors and Actuators A: Physical

IS - 37

T2 - Eurosensors VI

Y2 - 5 October 1992 through 7 October 1992

ER -

Thermal base drive for micromechanical resonators employing deep-diffusion bases

Abstract

Keywords

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