Thermal damage in Mo/Si based multilayers for short-wavelength FELs

Andrey Yakshin, R.W.E. Van de Kruis, R. Sobierajski, Eric Louis, S. Bruijn, R.A. Loch, Frederik Bijkerk

Research output: Other contributionOther research output

Original languageEnglish
TypeAward
Place of PublicationKyoto, Japan
Publication statusPublished - 2011

Keywords

  • METIS-304972

Cite this

@misc{6c494f78c1c34291b114f2a40f0ee41b,
title = "Thermal damage in Mo/Si based multilayers for short-wavelength FELs",
keywords = "METIS-304972",
author = "Andrey Yakshin and {Van de Kruis}, R.W.E. and R. Sobierajski and Eric Louis and S. Bruijn and R.A. Loch and Frederik Bijkerk",
note = "Award for Encouragement of Research in Thin Films to Andrey Yakshin: At the 15th triennial conference on Thin Films (ICTF15) held in Kyoto, last November, Andrey Yakshin has won an award on a relatively new application of multilayer optics. Yakshin presented results on the use of multilayer optics for the next 'grand challenge' for such optics after the successful usage in Extreme UV lithography. This new field concerns Free Electron Lasers in the XUV wavelength range: multilayer structures can enable new experimental schemes and FEL beamlines once their robustness has been demonstrated convincingly. The results of the work show that there is a safe application range found, with the basic degrading layer diffusion processes now being largely understood. This opens up the way towards new improvements of the multilayer material compositions so that full usage at FEL becomes possible.",
year = "2011",
language = "English",
type = "Other",

}

Thermal damage in Mo/Si based multilayers for short-wavelength FELs. / Yakshin, Andrey; Van de Kruis, R.W.E.; Sobierajski, R.; Louis, Eric; Bruijn, S.; Loch, R.A.; Bijkerk, Frederik.

Kyoto, Japan. 2011, Award.

Research output: Other contributionOther research output

TY - GEN

T1 - Thermal damage in Mo/Si based multilayers for short-wavelength FELs

AU - Yakshin, Andrey

AU - Van de Kruis, R.W.E.

AU - Sobierajski, R.

AU - Louis, Eric

AU - Bruijn, S.

AU - Loch, R.A.

AU - Bijkerk, Frederik

N1 - Award for Encouragement of Research in Thin Films to Andrey Yakshin: At the 15th triennial conference on Thin Films (ICTF15) held in Kyoto, last November, Andrey Yakshin has won an award on a relatively new application of multilayer optics. Yakshin presented results on the use of multilayer optics for the next 'grand challenge' for such optics after the successful usage in Extreme UV lithography. This new field concerns Free Electron Lasers in the XUV wavelength range: multilayer structures can enable new experimental schemes and FEL beamlines once their robustness has been demonstrated convincingly. The results of the work show that there is a safe application range found, with the basic degrading layer diffusion processes now being largely understood. This opens up the way towards new improvements of the multilayer material compositions so that full usage at FEL becomes possible.

PY - 2011

Y1 - 2011

KW - METIS-304972

M3 - Other contribution

CY - Kyoto, Japan

ER -