Thermal design issues and performance of microcalorimeter arrays at sub-Kelvin temperatures

M.L. Ridder; M.P. Bruijn; H.F.C. Hoevers; A. Germeau; N.H.R. Baars; E. Krouwer; J.J.J. van Baar; Remco J. Wiegerink

doi:10.1109/ICSENS.2003.1278957

Thermal design issues and performance of microcalorimeter arrays at sub-Kelvin temperatures

M.L. Ridder, M.P. Bruijn, H.F.C. Hoevers, A. Germeau, N.H.R. Baars, E. Krouwer, J.J.J. van Baar, Remco J. Wiegerink

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Abstract

We have produced 5/spl times/5 pixel arrays of microcalorimeters using bulk micromachining. Analysis of our data provides the thermal conductivity parameters of Si/sub x/N/sub y/ 1 /spl mu/m thick membranes at 100 mK. Moreover we find that the thermal transport at 100 mK in Si beams, with dimensions 1.25 mm /spl times/ 0.35mm /spl times/ 35/spl mu/m (length /spl times/ height /spl times/ width) is dominated by ballistic phonons with a mean free path of 110 /spl mu/m. These thermal parameters can be used for modelling future 32 /spl times/ 32 pixel arrays. In addition we operated three pixels in a 5 /spl times/ 5 array of microcalorimeters and find that the pixel to pixel reproducibility is very good. When used as an X-ray microcalorimeter individual pixels have a thermal decay time of 200 /spl mu/s is and their energy resolution is between 6 and 7 eV for 5.89 keV X-ray photons.

Original language	Undefined
Pages	353-357
Number of pages	5
DOIs	https://doi.org/10.1109/ICSENS.2003.1278957
Publication status	Published - 22 Oct 2003
Event	2003 IEEE Sensors: The 2nd Conference on Sensors - Toronto, Canada Duration: 22 Oct 2003 → 24 Oct 2003 http://ewh.ieee.org/conf/sensors2003/

Conference

Conference	2003 IEEE Sensors
Country	Canada
City	Toronto
Period	22/10/03 → 24/10/03
Internet address	http://ewh.ieee.org/conf/sensors2003/

Keywords

IR-64728
EWI-12296

Access to Document

10.1109/ICSENS.2003.1278957

ieesensors_1_353
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ieesensors_1_353
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Cite this

Ridder, M. L., Bruijn, M. P., Hoevers, H. F. C., Germeau, A., Baars, N. H. R., Krouwer, E., ... Wiegerink, R. J. (2003). Thermal design issues and performance of microcalorimeter arrays at sub-Kelvin temperatures. 353-357. Paper presented at 2003 IEEE Sensors, Toronto, Canada. https://doi.org/10.1109/ICSENS.2003.1278957

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abstract = "We have produced 5/spl times/5 pixel arrays of microcalorimeters using bulk micromachining. Analysis of our data provides the thermal conductivity parameters of Si/sub x/N/sub y/ 1 /spl mu/m thick membranes at 100 mK. Moreover we find that the thermal transport at 100 mK in Si beams, with dimensions 1.25 mm /spl times/ 0.35mm /spl times/ 35/spl mu/m (length /spl times/ height /spl times/ width) is dominated by ballistic phonons with a mean free path of 110 /spl mu/m. These thermal parameters can be used for modelling future 32 /spl times/ 32 pixel arrays. In addition we operated three pixels in a 5 /spl times/ 5 array of microcalorimeters and find that the pixel to pixel reproducibility is very good. When used as an X-ray microcalorimeter individual pixels have a thermal decay time of 200 /spl mu/s is and their energy resolution is between 6 and 7 eV for 5.89 keV X-ray photons.",

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author = "M.L. Ridder and M.P. Bruijn and H.F.C. Hoevers and A. Germeau and N.H.R. Baars and E. Krouwer and {van Baar}, J.J.J. and Wiegerink, {Remco J.}",

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AU - Ridder, M.L.

AU - Bruijn, M.P.

AU - Hoevers, H.F.C.

AU - Germeau, A.

AU - Baars, N.H.R.

AU - Krouwer, E.

AU - van Baar, J.J.J.

AU - Wiegerink, Remco J.

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N2 - We have produced 5/spl times/5 pixel arrays of microcalorimeters using bulk micromachining. Analysis of our data provides the thermal conductivity parameters of Si/sub x/N/sub y/ 1 /spl mu/m thick membranes at 100 mK. Moreover we find that the thermal transport at 100 mK in Si beams, with dimensions 1.25 mm /spl times/ 0.35mm /spl times/ 35/spl mu/m (length /spl times/ height /spl times/ width) is dominated by ballistic phonons with a mean free path of 110 /spl mu/m. These thermal parameters can be used for modelling future 32 /spl times/ 32 pixel arrays. In addition we operated three pixels in a 5 /spl times/ 5 array of microcalorimeters and find that the pixel to pixel reproducibility is very good. When used as an X-ray microcalorimeter individual pixels have a thermal decay time of 200 /spl mu/s is and their energy resolution is between 6 and 7 eV for 5.89 keV X-ray photons.

AB - We have produced 5/spl times/5 pixel arrays of microcalorimeters using bulk micromachining. Analysis of our data provides the thermal conductivity parameters of Si/sub x/N/sub y/ 1 /spl mu/m thick membranes at 100 mK. Moreover we find that the thermal transport at 100 mK in Si beams, with dimensions 1.25 mm /spl times/ 0.35mm /spl times/ 35/spl mu/m (length /spl times/ height /spl times/ width) is dominated by ballistic phonons with a mean free path of 110 /spl mu/m. These thermal parameters can be used for modelling future 32 /spl times/ 32 pixel arrays. In addition we operated three pixels in a 5 /spl times/ 5 array of microcalorimeters and find that the pixel to pixel reproducibility is very good. When used as an X-ray microcalorimeter individual pixels have a thermal decay time of 200 /spl mu/s is and their energy resolution is between 6 and 7 eV for 5.89 keV X-ray photons.

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