Thermal design issues and performance of microcalorimeter arrays at sub-Kelvin temperatures

M.L. Ridder, M.P. Bruijn, H.F.C. Hoevers, A. Germeau, N.H.R. Baars, E. Krouwer, J.J.J. van Baar, Remco J. Wiegerink

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    We have produced 5/spl times/5 pixel arrays of microcalorimeters using bulk micromachining. Analysis of our data provides the thermal conductivity parameters of Si/sub x/N/sub y/ 1 /spl mu/m thick membranes at 100 mK. Moreover we find that the thermal transport at 100 mK in Si beams, with dimensions 1.25 mm /spl times/ 0.35mm /spl times/ 35/spl mu/m (length /spl times/ height /spl times/ width) is dominated by ballistic phonons with a mean free path of 110 /spl mu/m. These thermal parameters can be used for modelling future 32 /spl times/ 32 pixel arrays. In addition we operated three pixels in a 5 /spl times/ 5 array of microcalorimeters and find that the pixel to pixel reproducibility is very good. When used as an X-ray microcalorimeter individual pixels have a thermal decay time of 200 /spl mu/s is and their energy resolution is between 6 and 7 eV for 5.89 keV X-ray photons.
    Original languageUndefined
    Number of pages5
    Publication statusPublished - 22 Oct 2003
    Event2003 IEEE Sensors: The 2nd Conference on Sensors - Toronto, Canada
    Duration: 22 Oct 200324 Oct 2003


    Conference2003 IEEE Sensors
    Internet address


    • IR-64728
    • EWI-12296

    Cite this

    Ridder, M. L., Bruijn, M. P., Hoevers, H. F. C., Germeau, A., Baars, N. H. R., Krouwer, E., ... Wiegerink, R. J. (2003). Thermal design issues and performance of microcalorimeter arrays at sub-Kelvin temperatures. 353-357. Paper presented at 2003 IEEE Sensors, Toronto, Canada.