Thermal design issues and performance of microcalorimeter arrays at sub-Kelvin temperatures

M.L. Ridder, M.P. Bruijn, H.F.C. Hoevers, A. Germeau, N.H.R. Baars, E. Krouwer, J.J.J. van Baar, Remco J. Wiegerink

Research output: Contribution to conferencePaperAcademicpeer-review

1 Citation (Scopus)
28 Downloads (Pure)

Abstract

We have produced 5/spl times/5 pixel arrays of microcalorimeters using bulk micromachining. Analysis of our data provides the thermal conductivity parameters of Si/sub x/N/sub y/ 1 /spl mu/m thick membranes at 100 mK. Moreover we find that the thermal transport at 100 mK in Si beams, with dimensions 1.25 mm /spl times/ 0.35mm /spl times/ 35/spl mu/m (length /spl times/ height /spl times/ width) is dominated by ballistic phonons with a mean free path of 110 /spl mu/m. These thermal parameters can be used for modelling future 32 /spl times/ 32 pixel arrays. In addition we operated three pixels in a 5 /spl times/ 5 array of microcalorimeters and find that the pixel to pixel reproducibility is very good. When used as an X-ray microcalorimeter individual pixels have a thermal decay time of 200 /spl mu/s is and their energy resolution is between 6 and 7 eV for 5.89 keV X-ray photons.
Original languageUndefined
Pages353-357
Number of pages5
DOIs
Publication statusPublished - 22 Oct 2003
Event2003 IEEE Sensors: The 2nd Conference on Sensors - Toronto, Canada
Duration: 22 Oct 200324 Oct 2003
http://ewh.ieee.org/conf/sensors2003/

Conference

Conference2003 IEEE Sensors
CountryCanada
CityToronto
Period22/10/0324/10/03
Internet address

Keywords

  • IR-64728
  • EWI-12296

Cite this

Ridder, M. L., Bruijn, M. P., Hoevers, H. F. C., Germeau, A., Baars, N. H. R., Krouwer, E., ... Wiegerink, R. J. (2003). Thermal design issues and performance of microcalorimeter arrays at sub-Kelvin temperatures. 353-357. Paper presented at 2003 IEEE Sensors, Toronto, Canada. https://doi.org/10.1109/ICSENS.2003.1278957
Ridder, M.L. ; Bruijn, M.P. ; Hoevers, H.F.C. ; Germeau, A. ; Baars, N.H.R. ; Krouwer, E. ; van Baar, J.J.J. ; Wiegerink, Remco J. / Thermal design issues and performance of microcalorimeter arrays at sub-Kelvin temperatures. Paper presented at 2003 IEEE Sensors, Toronto, Canada.5 p.
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author = "M.L. Ridder and M.P. Bruijn and H.F.C. Hoevers and A. Germeau and N.H.R. Baars and E. Krouwer and {van Baar}, J.J.J. and Wiegerink, {Remco J.}",
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Ridder, ML, Bruijn, MP, Hoevers, HFC, Germeau, A, Baars, NHR, Krouwer, E, van Baar, JJJ & Wiegerink, RJ 2003, 'Thermal design issues and performance of microcalorimeter arrays at sub-Kelvin temperatures' Paper presented at 2003 IEEE Sensors, Toronto, Canada, 22/10/03 - 24/10/03, pp. 353-357. https://doi.org/10.1109/ICSENS.2003.1278957

Thermal design issues and performance of microcalorimeter arrays at sub-Kelvin temperatures. / Ridder, M.L.; Bruijn, M.P.; Hoevers, H.F.C.; Germeau, A.; Baars, N.H.R.; Krouwer, E.; van Baar, J.J.J.; Wiegerink, Remco J.

2003. 353-357 Paper presented at 2003 IEEE Sensors, Toronto, Canada.

Research output: Contribution to conferencePaperAcademicpeer-review

TY - CONF

T1 - Thermal design issues and performance of microcalorimeter arrays at sub-Kelvin temperatures

AU - Ridder, M.L.

AU - Bruijn, M.P.

AU - Hoevers, H.F.C.

AU - Germeau, A.

AU - Baars, N.H.R.

AU - Krouwer, E.

AU - van Baar, J.J.J.

AU - Wiegerink, Remco J.

PY - 2003/10/22

Y1 - 2003/10/22

N2 - We have produced 5/spl times/5 pixel arrays of microcalorimeters using bulk micromachining. Analysis of our data provides the thermal conductivity parameters of Si/sub x/N/sub y/ 1 /spl mu/m thick membranes at 100 mK. Moreover we find that the thermal transport at 100 mK in Si beams, with dimensions 1.25 mm /spl times/ 0.35mm /spl times/ 35/spl mu/m (length /spl times/ height /spl times/ width) is dominated by ballistic phonons with a mean free path of 110 /spl mu/m. These thermal parameters can be used for modelling future 32 /spl times/ 32 pixel arrays. In addition we operated three pixels in a 5 /spl times/ 5 array of microcalorimeters and find that the pixel to pixel reproducibility is very good. When used as an X-ray microcalorimeter individual pixels have a thermal decay time of 200 /spl mu/s is and their energy resolution is between 6 and 7 eV for 5.89 keV X-ray photons.

AB - We have produced 5/spl times/5 pixel arrays of microcalorimeters using bulk micromachining. Analysis of our data provides the thermal conductivity parameters of Si/sub x/N/sub y/ 1 /spl mu/m thick membranes at 100 mK. Moreover we find that the thermal transport at 100 mK in Si beams, with dimensions 1.25 mm /spl times/ 0.35mm /spl times/ 35/spl mu/m (length /spl times/ height /spl times/ width) is dominated by ballistic phonons with a mean free path of 110 /spl mu/m. These thermal parameters can be used for modelling future 32 /spl times/ 32 pixel arrays. In addition we operated three pixels in a 5 /spl times/ 5 array of microcalorimeters and find that the pixel to pixel reproducibility is very good. When used as an X-ray microcalorimeter individual pixels have a thermal decay time of 200 /spl mu/s is and their energy resolution is between 6 and 7 eV for 5.89 keV X-ray photons.

KW - IR-64728

KW - EWI-12296

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DO - 10.1109/ICSENS.2003.1278957

M3 - Paper

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EP - 357

ER -

Ridder ML, Bruijn MP, Hoevers HFC, Germeau A, Baars NHR, Krouwer E et al. Thermal design issues and performance of microcalorimeter arrays at sub-Kelvin temperatures. 2003. Paper presented at 2003 IEEE Sensors, Toronto, Canada. https://doi.org/10.1109/ICSENS.2003.1278957