Abstract
| Original language | Undefined |
|---|---|
| Pages | 353-357 |
| Number of pages | 5 |
| DOIs | |
| Publication status | Published - 22 Oct 2003 |
| Event | 2003 IEEE Sensors: The 2nd Conference on Sensors - Toronto, Canada Duration: 22 Oct 2003 → 24 Oct 2003 http://ewh.ieee.org/conf/sensors2003/ |
Conference
| Conference | 2003 IEEE Sensors |
|---|---|
| Country | Canada |
| City | Toronto |
| Period | 22/10/03 → 24/10/03 |
| Internet address |
Keywords
- IR-64728
- EWI-12296
Cite this
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Thermal design issues and performance of microcalorimeter arrays at sub-Kelvin temperatures. / Ridder, M.L.; Bruijn, M.P.; Hoevers, H.F.C.; Germeau, A.; Baars, N.H.R.; Krouwer, E.; van Baar, J.J.J.; Wiegerink, Remco J.
2003. 353-357 Paper presented at 2003 IEEE Sensors, Toronto, Canada.Research output: Contribution to conference › Paper › Academic › peer-review
TY - CONF
T1 - Thermal design issues and performance of microcalorimeter arrays at sub-Kelvin temperatures
AU - Ridder, M.L.
AU - Bruijn, M.P.
AU - Hoevers, H.F.C.
AU - Germeau, A.
AU - Baars, N.H.R.
AU - Krouwer, E.
AU - van Baar, J.J.J.
AU - Wiegerink, Remco J.
PY - 2003/10/22
Y1 - 2003/10/22
N2 - We have produced 5/spl times/5 pixel arrays of microcalorimeters using bulk micromachining. Analysis of our data provides the thermal conductivity parameters of Si/sub x/N/sub y/ 1 /spl mu/m thick membranes at 100 mK. Moreover we find that the thermal transport at 100 mK in Si beams, with dimensions 1.25 mm /spl times/ 0.35mm /spl times/ 35/spl mu/m (length /spl times/ height /spl times/ width) is dominated by ballistic phonons with a mean free path of 110 /spl mu/m. These thermal parameters can be used for modelling future 32 /spl times/ 32 pixel arrays. In addition we operated three pixels in a 5 /spl times/ 5 array of microcalorimeters and find that the pixel to pixel reproducibility is very good. When used as an X-ray microcalorimeter individual pixels have a thermal decay time of 200 /spl mu/s is and their energy resolution is between 6 and 7 eV for 5.89 keV X-ray photons.
AB - We have produced 5/spl times/5 pixel arrays of microcalorimeters using bulk micromachining. Analysis of our data provides the thermal conductivity parameters of Si/sub x/N/sub y/ 1 /spl mu/m thick membranes at 100 mK. Moreover we find that the thermal transport at 100 mK in Si beams, with dimensions 1.25 mm /spl times/ 0.35mm /spl times/ 35/spl mu/m (length /spl times/ height /spl times/ width) is dominated by ballistic phonons with a mean free path of 110 /spl mu/m. These thermal parameters can be used for modelling future 32 /spl times/ 32 pixel arrays. In addition we operated three pixels in a 5 /spl times/ 5 array of microcalorimeters and find that the pixel to pixel reproducibility is very good. When used as an X-ray microcalorimeter individual pixels have a thermal decay time of 200 /spl mu/s is and their energy resolution is between 6 and 7 eV for 5.89 keV X-ray photons.
KW - IR-64728
KW - EWI-12296
U2 - 10.1109/ICSENS.2003.1278957
DO - 10.1109/ICSENS.2003.1278957
M3 - Paper
SP - 353
EP - 357
ER -