Thermal design issues and performance of microcalorimeter arrays at sub-Kelvin temperatures

M.L. Ridder; M.P. Bruijn; H.F.C. Hoevers; A. Germeau; N.H.R. Baars; E. Krouwer; J.J.J. van Baar; Remco J. Wiegerink

doi:10.1109/ICSENS.2003.1278957

Thermal design issues and performance of microcalorimeter arrays at sub-Kelvin temperatures

M.L. Ridder, M.P. Bruijn, H.F.C. Hoevers, A. Germeau, N.H.R. Baars, E. Krouwer, J.J.J. van Baar, Remco J. Wiegerink

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Abstract

We have produced 5/spl times/5 pixel arrays of microcalorimeters using bulk micromachining. Analysis of our data provides the thermal conductivity parameters of Si/sub x/N/sub y/ 1 /spl mu/m thick membranes at 100 mK. Moreover we find that the thermal transport at 100 mK in Si beams, with dimensions 1.25 mm /spl times/ 0.35mm /spl times/ 35/spl mu/m (length /spl times/ height /spl times/ width) is dominated by ballistic phonons with a mean free path of 110 /spl mu/m. These thermal parameters can be used for modelling future 32 /spl times/ 32 pixel arrays. In addition we operated three pixels in a 5 /spl times/ 5 array of microcalorimeters and find that the pixel to pixel reproducibility is very good. When used as an X-ray microcalorimeter individual pixels have a thermal decay time of 200 /spl mu/s is and their energy resolution is between 6 and 7 eV for 5.89 keV X-ray photons.

Original language	Undefined
Pages	353-357
Number of pages	5
DOIs	https://doi.org/10.1109/ICSENS.2003.1278957
Publication status	Published - 22 Oct 2003
Event	2003 IEEE Sensors: The 2nd Conference on Sensors - Toronto, Canada Duration: 22 Oct 2003 → 24 Oct 2003 http://ewh.ieee.org/conf/sensors2003/

Conference

Conference	2003 IEEE Sensors
Country/Territory	Canada
City	Toronto
Period	22/10/03 → 24/10/03
Internet address	http://ewh.ieee.org/conf/sensors2003/

Keywords

IR-64728
EWI-12296

Access to Document

10.1109/ICSENS.2003.1278957

Cite this

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title = "Thermal design issues and performance of microcalorimeter arrays at sub-Kelvin temperatures",

abstract = "We have produced 5/spl times/5 pixel arrays of microcalorimeters using bulk micromachining. Analysis of our data provides the thermal conductivity parameters of Si/sub x/N/sub y/ 1 /spl mu/m thick membranes at 100 mK. Moreover we find that the thermal transport at 100 mK in Si beams, with dimensions 1.25 mm /spl times/ 0.35mm /spl times/ 35/spl mu/m (length /spl times/ height /spl times/ width) is dominated by ballistic phonons with a mean free path of 110 /spl mu/m. These thermal parameters can be used for modelling future 32 /spl times/ 32 pixel arrays. In addition we operated three pixels in a 5 /spl times/ 5 array of microcalorimeters and find that the pixel to pixel reproducibility is very good. When used as an X-ray microcalorimeter individual pixels have a thermal decay time of 200 /spl mu/s is and their energy resolution is between 6 and 7 eV for 5.89 keV X-ray photons.",

keywords = "IR-64728, EWI-12296",

author = "M.L. Ridder and M.P. Bruijn and H.F.C. Hoevers and A. Germeau and N.H.R. Baars and E. Krouwer and {van Baar}, J.J.J. and Wiegerink, {Remco J.}",

year = "2003",

month = oct,

day = "22",

doi = "10.1109/ICSENS.2003.1278957",

language = "Undefined",

pages = "353--357",

note = "null ; Conference date: 22-10-2003 Through 24-10-2003",

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TY - CONF

T1 - Thermal design issues and performance of microcalorimeter arrays at sub-Kelvin temperatures

AU - Ridder, M.L.

AU - Bruijn, M.P.

AU - Hoevers, H.F.C.

AU - Germeau, A.

AU - Baars, N.H.R.

AU - Krouwer, E.

AU - van Baar, J.J.J.

AU - Wiegerink, Remco J.

PY - 2003/10/22

Y1 - 2003/10/22

N2 - We have produced 5/spl times/5 pixel arrays of microcalorimeters using bulk micromachining. Analysis of our data provides the thermal conductivity parameters of Si/sub x/N/sub y/ 1 /spl mu/m thick membranes at 100 mK. Moreover we find that the thermal transport at 100 mK in Si beams, with dimensions 1.25 mm /spl times/ 0.35mm /spl times/ 35/spl mu/m (length /spl times/ height /spl times/ width) is dominated by ballistic phonons with a mean free path of 110 /spl mu/m. These thermal parameters can be used for modelling future 32 /spl times/ 32 pixel arrays. In addition we operated three pixels in a 5 /spl times/ 5 array of microcalorimeters and find that the pixel to pixel reproducibility is very good. When used as an X-ray microcalorimeter individual pixels have a thermal decay time of 200 /spl mu/s is and their energy resolution is between 6 and 7 eV for 5.89 keV X-ray photons.

AB - We have produced 5/spl times/5 pixel arrays of microcalorimeters using bulk micromachining. Analysis of our data provides the thermal conductivity parameters of Si/sub x/N/sub y/ 1 /spl mu/m thick membranes at 100 mK. Moreover we find that the thermal transport at 100 mK in Si beams, with dimensions 1.25 mm /spl times/ 0.35mm /spl times/ 35/spl mu/m (length /spl times/ height /spl times/ width) is dominated by ballistic phonons with a mean free path of 110 /spl mu/m. These thermal parameters can be used for modelling future 32 /spl times/ 32 pixel arrays. In addition we operated three pixels in a 5 /spl times/ 5 array of microcalorimeters and find that the pixel to pixel reproducibility is very good. When used as an X-ray microcalorimeter individual pixels have a thermal decay time of 200 /spl mu/s is and their energy resolution is between 6 and 7 eV for 5.89 keV X-ray photons.

KW - IR-64728

KW - EWI-12296

U2 - 10.1109/ICSENS.2003.1278957

DO - 10.1109/ICSENS.2003.1278957

M3 - Paper

SP - 353

EP - 357

Y2 - 22 October 2003 through 24 October 2003

ER -