Thermal flow micro sensors

Michael Curt Elwenspoek

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    75 Citations (Scopus)
    117 Downloads (Pure)

    Abstract

    A review is given on sensors fabricated by silicon micromachining technology using the thermal domain for the measurement of fluid flow. Attention is paid especially to performance and geometry of the sensors. Three basic types of thermal flow sensors are discussed: anemometers, calorimetric flow sensors and time of flight flow sensors. Anemometers may comprise several heaters and temperature sensors and from a geometric point of view are similar sometimes for calorimetric flow sensors. We find that depending on the Reynolds number to or three element anemometers may perform as calorimetric sensors (very small Re) while calorimetric flow sensors operate like anemometers in the high Re regime.
    Original languageUndefined
    Title of host publicationProceedings of the 1999 International Semiconductor Conference (CAS '99)
    Place of PublicationPiscataway
    PublisherIEEE Computer Society
    Pages423-435
    Number of pages13
    ISBN (Print)0-7803-5139-8
    DOIs
    Publication statusPublished - 5 Oct 1999
    EventInternational Semiconductor Conference, CAS 1999 - Sinaia, Romania
    Duration: 5 Oct 19999 Oct 1999

    Publication series

    Name
    PublisherIEEE
    Volume2

    Conference

    ConferenceInternational Semiconductor Conference, CAS 1999
    Period5/10/999/10/99
    Other5-9 October 1999

    Keywords

    • METIS-112715
    • EWI-13208
    • IR-15833

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