Thermal modeling of a Mems for determination of fluid and flow characteristics

N. Damean; Paulus P.L. Regtien

Thermal modeling of a Mems for determination of fluid and flow characteristics

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

Original language	Undefined
Title of host publication	Proceedings of SPIE, The International Society for optical Engineering, Design, Characterization and Packaging for MEMS and Microelectronics II
Editors	P.D. Franzon
Place of Publication	Washington, USA
Publisher	SPIE
Pages	164-175
Number of pages	12
ISBN (Print)	0-8194-4323-9
Publication status	Published - 17 Dec 2001
Event	Adelaide, Australia: Proceedings of SPIE, The International Society for optical Engineering, Design, Characterization and Packaging for MEMS and Microelectronics II - Washington, USA Duration: 17 Dec 2001 → 19 Dec 2001

Publication series

Name
Volume	4593

Conference

Conference	Adelaide, Australia
City	Washington, USA
Period	17/12/01 → 19/12/01

Keywords

METIS-206991

Cite this

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title = "Thermal modeling of a Mems for determination of fluid and flow characteristics",

keywords = "METIS-206991",

author = "N. Damean and Regtien, {Paulus P.L.}",

note = "nr. 037M01 ; Adelaide, Australia ; Conference date: 17-12-2001 Through 19-12-2001",

year = "2001",

month = dec,

day = "17",

language = "Undefined",

isbn = "0-8194-4323-9",

publisher = "SPIE",

pages = "164--175",

editor = "P.D. Franzon",

booktitle = "Proceedings of SPIE, The International Society for optical Engineering, Design, Characterization and Packaging for MEMS and Microelectronics II",

address = "United States",

}

Thermal modeling of a Mems for determination of fluid and flow characteristics. / Damean, N.; Regtien, Paulus P.L.
Proceedings of SPIE, The International Society for optical Engineering, Design, Characterization and Packaging for MEMS and Microelectronics II. ed. / P.D. Franzon. Washington, USA: SPIE, 2001. p. 164-175.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

TY - GEN

T1 - Thermal modeling of a Mems for determination of fluid and flow characteristics

AU - Damean, N.

AU - Regtien, Paulus P.L.

N1 - nr. 037M01

PY - 2001/12/17

Y1 - 2001/12/17

KW - METIS-206991

M3 - Conference contribution

SN - 0-8194-4323-9

SP - 164

EP - 175

BT - Proceedings of SPIE, The International Society for optical Engineering, Design, Characterization and Packaging for MEMS and Microelectronics II

A2 - Franzon, P.D.

PB - SPIE

CY - Washington, USA

T2 - Adelaide, Australia

Y2 - 17 December 2001 through 19 December 2001

ER -