Thermal modeling of a Mems for determination of fluid and flow characteristics

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    Original languageUndefined
    Title of host publicationProceedings of SPIE, The International Society for optical Engineering, Design, Characterization and Packaging for MEMS and Microelectronics II
    EditorsP.D. Franzon
    Place of PublicationWashington, USA
    PublisherSPIE - The International Society for Optical Engineering
    Pages164-175
    Number of pages12
    ISBN (Print)0-8194-4323-9
    Publication statusPublished - 17 Dec 2001

    Publication series

    Name
    Volume4593

    Keywords

    • METIS-206991

    Cite this

    Damean, N., & Regtien, P. P. L. (2001). Thermal modeling of a Mems for determination of fluid and flow characteristics. In P. D. Franzon (Ed.), Proceedings of SPIE, The International Society for optical Engineering, Design, Characterization and Packaging for MEMS and Microelectronics II (pp. 164-175). Washington, USA: SPIE - The International Society for Optical Engineering.
    Damean, N. ; Regtien, Paulus P.L. / Thermal modeling of a Mems for determination of fluid and flow characteristics. Proceedings of SPIE, The International Society for optical Engineering, Design, Characterization and Packaging for MEMS and Microelectronics II. editor / P.D. Franzon. Washington, USA : SPIE - The International Society for Optical Engineering, 2001. pp. 164-175
    @inproceedings{b48959fc89f14e1d81a086a7d948b156,
    title = "Thermal modeling of a Mems for determination of fluid and flow characteristics",
    keywords = "METIS-206991",
    author = "N. Damean and Regtien, {Paulus P.L.}",
    note = "nr. 037M01",
    year = "2001",
    month = "12",
    day = "17",
    language = "Undefined",
    isbn = "0-8194-4323-9",
    publisher = "SPIE - The International Society for Optical Engineering",
    pages = "164--175",
    editor = "P.D. Franzon",
    booktitle = "Proceedings of SPIE, The International Society for optical Engineering, Design, Characterization and Packaging for MEMS and Microelectronics II",

    }

    Damean, N & Regtien, PPL 2001, Thermal modeling of a Mems for determination of fluid and flow characteristics. in PD Franzon (ed.), Proceedings of SPIE, The International Society for optical Engineering, Design, Characterization and Packaging for MEMS and Microelectronics II. SPIE - The International Society for Optical Engineering, Washington, USA, pp. 164-175.

    Thermal modeling of a Mems for determination of fluid and flow characteristics. / Damean, N.; Regtien, Paulus P.L.

    Proceedings of SPIE, The International Society for optical Engineering, Design, Characterization and Packaging for MEMS and Microelectronics II. ed. / P.D. Franzon. Washington, USA : SPIE - The International Society for Optical Engineering, 2001. p. 164-175.

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    TY - GEN

    T1 - Thermal modeling of a Mems for determination of fluid and flow characteristics

    AU - Damean, N.

    AU - Regtien, Paulus P.L.

    N1 - nr. 037M01

    PY - 2001/12/17

    Y1 - 2001/12/17

    KW - METIS-206991

    M3 - Conference contribution

    SN - 0-8194-4323-9

    SP - 164

    EP - 175

    BT - Proceedings of SPIE, The International Society for optical Engineering, Design, Characterization and Packaging for MEMS and Microelectronics II

    A2 - Franzon, P.D.

    PB - SPIE - The International Society for Optical Engineering

    CY - Washington, USA

    ER -

    Damean N, Regtien PPL. Thermal modeling of a Mems for determination of fluid and flow characteristics. In Franzon PD, editor, Proceedings of SPIE, The International Society for optical Engineering, Design, Characterization and Packaging for MEMS and Microelectronics II. Washington, USA: SPIE - The International Society for Optical Engineering. 2001. p. 164-175