Thermal modelling of a MEMS for determination of fluid and flow characteristics

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    Original languageUndefined
    Title of host publicationProceedings of SPIE-The International Society for Optical Engineering, Design, Characterization, and Packaging for MEMS and Microelectronics II
    EditorsP.D. Franzon
    Place of PublicationWashington, USA
    PublisherSPIE - The International Society for Optical Engineering
    Pages164-175
    Number of pages12
    ISBN (Print)0-8194-4323-9
    Publication statusPublished - 17 Dec 2001

    Publication series

    Name
    Volume4593

    Keywords

    • METIS-201108

    Cite this

    Damean, N., & Regtien, P. P. L. (2001). Thermal modelling of a MEMS for determination of fluid and flow characteristics. In P. D. Franzon (Ed.), Proceedings of SPIE-The International Society for Optical Engineering, Design, Characterization, and Packaging for MEMS and Microelectronics II (pp. 164-175). Washington, USA: SPIE - The International Society for Optical Engineering.
    Damean, N. ; Regtien, Paulus P.L. / Thermal modelling of a MEMS for determination of fluid and flow characteristics. Proceedings of SPIE-The International Society for Optical Engineering, Design, Characterization, and Packaging for MEMS and Microelectronics II. editor / P.D. Franzon. Washington, USA : SPIE - The International Society for Optical Engineering, 2001. pp. 164-175
    @inproceedings{e31229cb7a554ba1baf8e570232cddca,
    title = "Thermal modelling of a MEMS for determination of fluid and flow characteristics",
    keywords = "METIS-201108",
    author = "N. Damean and Regtien, {Paulus P.L.}",
    note = "rapp.nr. 037M01",
    year = "2001",
    month = "12",
    day = "17",
    language = "Undefined",
    isbn = "0-8194-4323-9",
    publisher = "SPIE - The International Society for Optical Engineering",
    pages = "164--175",
    editor = "P.D. Franzon",
    booktitle = "Proceedings of SPIE-The International Society for Optical Engineering, Design, Characterization, and Packaging for MEMS and Microelectronics II",

    }

    Damean, N & Regtien, PPL 2001, Thermal modelling of a MEMS for determination of fluid and flow characteristics. in PD Franzon (ed.), Proceedings of SPIE-The International Society for Optical Engineering, Design, Characterization, and Packaging for MEMS and Microelectronics II. SPIE - The International Society for Optical Engineering, Washington, USA, pp. 164-175.

    Thermal modelling of a MEMS for determination of fluid and flow characteristics. / Damean, N.; Regtien, Paulus P.L.

    Proceedings of SPIE-The International Society for Optical Engineering, Design, Characterization, and Packaging for MEMS and Microelectronics II. ed. / P.D. Franzon. Washington, USA : SPIE - The International Society for Optical Engineering, 2001. p. 164-175.

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    TY - GEN

    T1 - Thermal modelling of a MEMS for determination of fluid and flow characteristics

    AU - Damean, N.

    AU - Regtien, Paulus P.L.

    N1 - rapp.nr. 037M01

    PY - 2001/12/17

    Y1 - 2001/12/17

    KW - METIS-201108

    M3 - Conference contribution

    SN - 0-8194-4323-9

    SP - 164

    EP - 175

    BT - Proceedings of SPIE-The International Society for Optical Engineering, Design, Characterization, and Packaging for MEMS and Microelectronics II

    A2 - Franzon, P.D.

    PB - SPIE - The International Society for Optical Engineering

    CY - Washington, USA

    ER -

    Damean N, Regtien PPL. Thermal modelling of a MEMS for determination of fluid and flow characteristics. In Franzon PD, editor, Proceedings of SPIE-The International Society for Optical Engineering, Design, Characterization, and Packaging for MEMS and Microelectronics II. Washington, USA: SPIE - The International Society for Optical Engineering. 2001. p. 164-175