Abstract
In micromachining technology, the reduction in the size of the moving structures has many advantages in different applications. However, these moving structures are subjected to mechanical noise resulting from the molecule agitation. In this abstract, we investigate the thermal-mechanical noise in our artificial hair-flow sensor. The realization of such sensors with high sensitivities requires designs with both low thermal-mechanical noise and high-resolution of angular displacement.
| Original language | Undefined |
|---|---|
| Title of host publication | Proceedings of the 1st International Conference on Natural and Biomimetic Mechanosensing |
| Publisher | Forschungszentrum Jülich |
| Pages | 64 |
| Number of pages | 1 |
| ISBN (Print) | 978-3-89336-583-8 |
| Publication status | Published - Oct 2009 |
| Event | 1st International Conference on Natural and Biomimetic Mechanosensing, NBM 2009 - Dresden, Germany Duration: 26 Oct 2009 → 28 Oct 2009 Conference number: 1 http://www.cilia-bionics.org/nbm_conference/ |
Publication series
| Name | |
|---|---|
| Publisher | Forschungszentrum Julich Gmbh |
| ISSN (Print) | 1433-5565 |
Conference
| Conference | 1st International Conference on Natural and Biomimetic Mechanosensing, NBM 2009 |
|---|---|
| Abbreviated title | NBM |
| Country/Territory | Germany |
| City | Dresden |
| Period | 26/10/09 → 28/10/09 |
| Internet address |
Keywords
- IR-68535
- METIS-263910
- EWI-15674
- TST-SENSORS
- TST-Life like