Thermal stability of high-reflectance La/B-based multilayers for 6.x nm wavelength

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We have investigated the thermal stability of La/B-based (LaN/La/B) multilayer structures with partial-layer nitridation of La, a method shown earlier to result in enhanced reflectivity. The structures were annealed in the temperature range 100–500 °C for 70 h. They showed period drifts by 0.005 nm at 100 °C to 0.06 nm at 500 °C. A reflectivity loss of more than 2% was only observed after annealing above 300 °C. The study included separate investigation of B-on-LaN and LaN-on-La-on-B interfaces.
Original languageEnglish
Article number125302
JournalJournal of Applied Physics
Issue number12
Publication statusPublished - 28 Sep 2017

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