Thermally assisted ion beam etching of PTFE. A new technique for high aspect ratio etching of MEMS

Johan W. Berenschot, Henricus V. Jansen, G.J. Burger, Johannes G.E. Gardeniers, Michael Curt Elwenspoek

    Research output: Other contribution › Other research output

    Original languageUndefined
    Place of PublicationDish Hotel, Enschede
    Publication statusPublished - 5 Jun 1996

    Keywords

    • METIS-131169

    Cite this

    Berenschot, J. W., Jansen, H. V., Burger, G. J., Gardeniers, J. G. E., & Elwenspoek, M. C. (1996, Jun 5). Thermally assisted ion beam etching of PTFE. A new technique for high aspect ratio etching of MEMS. Dish Hotel, Enschede.