Thermally assisted ion beam etching of PTFE. A new technique for high aspect ratio etching of MEMS

Johan W. Berenschot, Henricus V. Jansen, G.J. Burger, Johannes G.E. Gardeniers, Michael Curt Elwenspoek

Research output: Other contribution › Other research output

Keywords

@misc{cb984df760e54dffbaced98d0de3a6b9,

title = "Thermally assisted ion beam etching of PTFE. A new technique for high aspect ratio etching of MEMS",

keywords = "METIS-131169",

author = "Berenschot, {Johan W.} and Jansen, {Henricus V.} and G.J. Burger and Gardeniers, {Johannes G.E.} and Elwenspoek, {Michael Curt}",

year = "1996",

month = jun,

day = "5",

language = "Undefined",

type = "Other",

}