Thermally assisted ion beam etching of PTFE. A new technique for high aspect ratio etching of MEMS

Johan W. Berenschot, Henricus V. Jansen, G.J. Burger, Johannes G.E. Gardeniers, Michael Curt Elwenspoek

    Research output: Other contributionOther research output

    Original languageUndefined
    Place of PublicationDish Hotel, Enschede
    Publication statusPublished - 5 Jun 1996


    • METIS-131169

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