Thermally assisted ion beam etching of PTFE. A new technique for high aspect ratio etching of MEMS

Research output: Other contribution › Other research output

Keywords

@misc{cb984df760e54dffbaced98d0de3a6b9,

title = "Thermally assisted ion beam etching of PTFE. A new technique for high aspect ratio etching of MEMS",

keywords = "METIS-131169",

author = "Berenschot, \{Johan W.\} and Jansen, \{Henricus V.\} and G.J. Burger and Gardeniers, \{Johannes G.E.\} and Elwenspoek, \{Michael Curt\}",

year = "1996",

month = jun,

day = "5",

language = "Undefined",

type = "Other",

}