Thermally induced diffusion phenomena and compound interlayer structural changes in EUV multilayers

S.L. Nyabero

Research output: ThesisPhD Thesis - Research external, graduation UTAcademic

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Abstract

Nanoscale multilayered structures are employed as reflective coatings for short wavelengths in a wide range of analytical and imaging technologies. Thermal stability is vital for their functionality. This thesis addresses the thermally induced internal structural changes in Mo/Si-based and La/B-based multilayers, designed for the extreme ultraviolet wavelength range. The focus of the work is to study the diffusion phenomena and the interactions between nanoscale layers, with particular emphasis on the formation of compound interlayers during thermal loading.
Original languageEnglish
Awarding Institution
  • University of Twente
Supervisors/Advisors
  • Bijkerk, Fred, Supervisor
  • van de Kruijs, Robbert W.E., Advisor
Award date7 Feb 2014
Place of PublicationEnschede
Publisher
Print ISBNs978-94-6259-070-0
Publication statusPublished - 7 Feb 2014

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interlayers
theses
wavelengths
thermal stability
coatings
interactions

Keywords

  • IR-89419
  • METIS-302432

Cite this

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Thermally induced diffusion phenomena and compound interlayer structural changes in EUV multilayers. / Nyabero, S.L.

Enschede : Universiteit Twente, 2014. 110 p.

Research output: ThesisPhD Thesis - Research external, graduation UTAcademic

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T1 - Thermally induced diffusion phenomena and compound interlayer structural changes in EUV multilayers

AU - Nyabero, S.L.

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N2 - Nanoscale multilayered structures are employed as reflective coatings for short wavelengths in a wide range of analytical and imaging technologies. Thermal stability is vital for their functionality. This thesis addresses the thermally induced internal structural changes in Mo/Si-based and La/B-based multilayers, designed for the extreme ultraviolet wavelength range. The focus of the work is to study the diffusion phenomena and the interactions between nanoscale layers, with particular emphasis on the formation of compound interlayers during thermal loading.

AB - Nanoscale multilayered structures are employed as reflective coatings for short wavelengths in a wide range of analytical and imaging technologies. Thermal stability is vital for their functionality. This thesis addresses the thermally induced internal structural changes in Mo/Si-based and La/B-based multilayers, designed for the extreme ultraviolet wavelength range. The focus of the work is to study the diffusion phenomena and the interactions between nanoscale layers, with particular emphasis on the formation of compound interlayers during thermal loading.

KW - IR-89419

KW - METIS-302432

M3 - PhD Thesis - Research external, graduation UT

SN - 978-94-6259-070-0

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