Thermally induced diffusion phenomena and compound interlayer structural changes in EUV multilayers

Steven L. Nyabero

Research output: ThesisPhD Thesis - Research external, graduation UT

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Abstract

Nanoscale multilayered structures are employed as reflective coatings for short wavelengths in a wide range of analytical and imaging technologies. Thermal stability is vital for their functionality. This thesis addresses the thermally induced internal structural changes in Mo/Si-based and La/B-based multilayers, designed for the extreme ultraviolet wavelength range. The focus of the work is to study the diffusion phenomena and the interactions between nanoscale layers, with particular emphasis on the formation of compound interlayers during thermal loading.
Original languageEnglish
QualificationDoctor of Philosophy
Awarding Institution
  • University of Twente
Supervisors/Advisors
  • Bijkerk, Fred, Supervisor
  • van de Kruijs, Robbert W.E., Co-Supervisor
Award date7 Feb 2014
Place of PublicationEnschede
Publisher
Print ISBNs978-94-6259-070-0
DOIs
Publication statusPublished - 7 Feb 2014

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