Thermally induced diffusion phenomena and compound interlayer structural changes in EUV multilayers

Steven L. Nyabero

doi:10.3990/1.9789462590700

Thermally induced diffusion phenomena and compound interlayer structural changes in EUV multilayers

Steven L. Nyabero

Research output: Thesis › PhD Thesis - Research external, graduation UT

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Abstract

Nanoscale multilayered structures are employed as reflective coatings for short wavelengths in a wide range of analytical and imaging technologies. Thermal stability is vital for their functionality. This thesis addresses the thermally induced internal structural changes in Mo/Si-based and La/B-based multilayers, designed for the extreme ultraviolet wavelength range. The focus of the work is to study the diffusion phenomena and the interactions between nanoscale layers, with particular emphasis on the formation of compound interlayers during thermal loading.

Original language	English
Qualification	Doctor of Philosophy
Awarding Institution	University of Twente
Supervisors/Advisors	Bijkerk, Fred, Supervisor van de Kruijs, Robbert W.E., Co-Supervisor
Award date	7 Feb 2014
Place of Publication	Enschede
Publisher	University of Twente
Print ISBNs	978-94-6259-070-0
DOIs	https://doi.org/10.3990/1.9789462590700
Publication status	Published - 7 Feb 2014

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Thesis S.L. NyaberoFinal published version, 36.7 MB

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title = "Thermally induced diffusion phenomena and compound interlayer structural changes in EUV multilayers",

abstract = "Nanoscale multilayered structures are employed as reflective coatings for short wavelengths in a wide range of analytical and imaging technologies. Thermal stability is vital for their functionality. This thesis addresses the thermally induced internal structural changes in Mo/Si-based and La/B-based multilayers, designed for the extreme ultraviolet wavelength range. The focus of the work is to study the diffusion phenomena and the interactions between nanoscale layers, with particular emphasis on the formation of compound interlayers during thermal loading.",

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U2 - 10.3990/1.9789462590700

DO - 10.3990/1.9789462590700

M3 - PhD Thesis - Research external, graduation UT

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ER -

Thermally induced diffusion phenomena and compound interlayer structural changes in EUV multilayers

Abstract

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