Skip to main navigation Skip to search Skip to main content

Thermodynamic analysis of semiconductor structures using a device simulator and lumped circuit modelling

  • A.J. Mouthaan
  • , B.H. Krabbenborg

    Research output: Contribution to journalArticleAcademicpeer-review

    Abstract

    Based on the implementation of coupled carrier and energy transport equations in a 2D object-oriented integrated package for device and process simulation, "TRENDY," electro­thermal effects in semiconductor structures have been analyzed. The same approach is used for the analysis of (thermo) magnetic effects in semiconductor structures. The object­oriented approach has also made it possible 10 analyze, e.g., ion transport in fluids for JSFET structures and stress calculations in IC-processing steps. 1n general the applicability of continuous domain simulation LO sensors and actuators is discussed. For 30 elect.rothermal problems, a distributed lumped circuit modelling strategy bas been examined.
    Original languageEnglish
    Pages (from-to)125-137
    JournalSensors and materials
    Volume6
    Issue number2
    Publication statusPublished - 1994

    Fingerprint

    Dive into the research topics of 'Thermodynamic analysis of semiconductor structures using a device simulator and lumped circuit modelling'. Together they form a unique fingerprint.

    Cite this