Abstract
Based on the implementation of coupled carrier and energy transport equations in a 2D object-oriented integrated package for device and process simulation, "TRENDY," electrothermal effects in semiconductor structures have been analyzed. The same approach is used for the analysis of (thermo) magnetic effects in semiconductor structures. The objectoriented approach has also made it possible 10 analyze, e.g., ion transport in fluids for JSFET structures and stress calculations in IC-processing steps. 1n general the applicability of continuous domain simulation LO sensors and actuators is discussed. For 30 elect.rothermal problems, a distributed lumped circuit modelling strategy bas been examined.
| Original language | English |
|---|---|
| Pages (from-to) | 125-137 |
| Journal | Sensors and materials |
| Volume | 6 |
| Issue number | 2 |
| Publication status | Published - 1994 |
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