Thin-film antifuses for pellistor type gas sensors

Alexeij Y. Kovalgin, J. Holleman, Albert van den Berg, Hans Wallinga

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic


    This work extends our previously reported idea of using the nano-scale conductive link (antifuse) as a combined heating /detecting element in a Pellistor-type gas sensor. Our new thin-film antifuse is designed in such a way that the oxide, for minimising the bulk influence on surface temperature, sufficiently thermally isolates the antifuse. The attention is paid to pre-determination of the antifuse location regarding the surface area. For the thin-film antifuses, the newly designed process flow employs standard LOCOS oxidation and CVD technology. Practical realisation of the first generation of thin-film antifuses is completed. Thermo-electrical characteristics of the devices are being under investigation.
    Original languageUndefined
    Title of host publicationProceedings of Semiconductor Sensor and Actuator Technology SeSens 2001
    Place of PublicationUtrecht, The Netherlands
    Number of pages4
    ISBN (Print)90-73461-29-4
    Publication statusPublished - 30 Nov 2001
    EventSTW/SeSence01 Conference: STW/SeSence01 - Veldhoven, the Netherlands
    Duration: 30 Nov 200130 Nov 2001


    ConferenceSTW/SeSence01 Conference
    CityVeldhoven, the Netherlands


    • Gas sensor
    • EWI-15633
    • IR-42212
    • nano-hotspot
    • Antifuse
    • METIS-200764

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