TY - JOUR
T1 - Thin film flexible/bendable acoustic wave devices
T2 - Evolution, hybridization and decoupling of multiple acoustic wave modes
AU - Tao, R.
AU - Wang, W.B.
AU - Luo, J.K.
AU - Ahmad Hasan, S.
AU - Torun, H.
AU - Canyelles-Pericas, P.
AU - Zhou, J.
AU - Xuan, W.P.
AU - Cooke, M.D.
AU - Gibson, D.
AU - Wu, Q.
AU - Ng, W.P.
AU - Luo, J.K.
AU - Fu, Y.Q.
N1 - Funding Information:
Funding support from National Key Research and Development Program of China (Grant no. 2016YFB0402705 ), the UK Engineering and Physical Sciences Research Council (EPSRC) for support under grant EP/P018998/1 Newton Mobility Grant ( IE161019 ) through Royal Society and the National Natural Science Foundation of China, and Royal academy of Engineering UK-Research Exchange with China and India, NSFC ( 51302173 , 61274037 ), Foundation for Distinguished Young Talents in Higher Education of Guangdong (Grant no. 2013LYM_0078 ), Basical Research Program of Shenzhen (Grant no. JCYJ20140418091413493 ). Wenbo Wang acknowledges the Lin Guangzhao & Hu Guozan Graduate Education International Exchange Fund for sponsoring his study in UK. Following persons are acknowledged for participating the work during the studies: Mr. Andrew Bunyan, Dr. Yifan Li, Dr. Chao Zhao, Dr. Yong Liu, Ahmed El-Hady, and Dr. Xingli He.
Publisher Copyright:
© 2018
PY - 2019/1/15
Y1 - 2019/1/15
N2 - Based on theoretical analysis, finite element simulation and experimental verifications, we have systematically investigated evolution, hybridization and decoupling of multiple acoustic wave modes and vibration patterns generated from piezoelectric film acoustic wave devices fabricated on flexible thin foils/plates. ZnO piezoelectric films deposited on flexible and bendable Al foil and plates were selected for this particular study. The ZnO/Al acoustic wave devices were chosen with wavelengths varied from 12 to 800 μm, ZnO film thickness from 2 to 10 μm and Al foil/plate thickness from 10 to 600 μm. Multiple acoustic wave modes (including symmetrical and asymmetrical Lamb waves, Rayleigh waves and higher harmonic/Sezawa wave modes) were generated, hybridized occasionally with each other, and then easily decoupled by changing the ratios of the substrate/film thicknesses to wavelengths. Ratios between device wavelength and substrate/film thickness have been identified to be the dominant parameter in determining the evolution and hybridization of multiple wave modes and their vibration patterns, which provide useful design guidance for both sensing and microfluidic applications using these flexible and bendable acoustic wave devices.
AB - Based on theoretical analysis, finite element simulation and experimental verifications, we have systematically investigated evolution, hybridization and decoupling of multiple acoustic wave modes and vibration patterns generated from piezoelectric film acoustic wave devices fabricated on flexible thin foils/plates. ZnO piezoelectric films deposited on flexible and bendable Al foil and plates were selected for this particular study. The ZnO/Al acoustic wave devices were chosen with wavelengths varied from 12 to 800 μm, ZnO film thickness from 2 to 10 μm and Al foil/plate thickness from 10 to 600 μm. Multiple acoustic wave modes (including symmetrical and asymmetrical Lamb waves, Rayleigh waves and higher harmonic/Sezawa wave modes) were generated, hybridized occasionally with each other, and then easily decoupled by changing the ratios of the substrate/film thicknesses to wavelengths. Ratios between device wavelength and substrate/film thickness have been identified to be the dominant parameter in determining the evolution and hybridization of multiple wave modes and their vibration patterns, which provide useful design guidance for both sensing and microfluidic applications using these flexible and bendable acoustic wave devices.
KW - Acoustic waves
KW - Flexible devices ZnO
KW - Lamb wave
KW - Surface acoustic wave
KW - Thin films
KW - n/a OA procedure
UR - http://www.scopus.com/inward/record.url?scp=85055339845&partnerID=8YFLogxK
U2 - 10.1016/j.surfcoat.2018.10.042
DO - 10.1016/j.surfcoat.2018.10.042
M3 - Article
AN - SCOPUS:85055339845
SN - 0257-8972
VL - 357
SP - 587
EP - 594
JO - Surface and coatings technology
JF - Surface and coatings technology
ER -