Thin-film piezoelectric impact sensor array fabricated on a Si slider for measuring head-disk interaction

S. Imai, M. Tokuyama, S. Hirose, G.J. Burger, T.S.J. Lammerink, J.H.J. Fluitman

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    A new type of Acoustic Emission sensor using a thin film piezoelectric material (sputtered ZnO) was developed for measuring head-disk interaction in a rigid magnetic disk system. The sensor is mounted on a Si slider (length: 3 mm) and was fabricated using micro-machining techniques in our on-going efforts to downsize sliders. Some fundamental tests of the sensor were conducted: sensitivity and frequency characteristics, and a flying test over a rotating bump disk.
    Original languageEnglish
    Article number10.1109/20.490253
    Pages (from-to)3009-3011
    Number of pages3
    JournalIEEE transactions on magnetics
    Issue number6
    Publication statusPublished - 18 Apr 1995


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