Abstract
A new type of Acoustic Emission sensor using a thin film piezoelectric material (sputtered ZnO) was developed for measuring head-disk interaction in a rigid magnetic disk system. The sensor is mounted on a Si slider (length: 3 mm) and was fabricated using micro-machining techniques in our on-going efforts to downsize sliders. Some fundamental tests of the sensor were conducted: sensitivity and frequency characteristics, and a flying test over a rotating bump disk.
Original language | English |
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Article number | 10.1109/20.490253 |
Pages (from-to) | 3009-3011 |
Number of pages | 3 |
Journal | IEEE transactions on magnetics |
Volume | 31 |
Issue number | 6 |
DOIs | |
Publication status | Published - 18 Apr 1995 |