Thin-film piezoelectric impact sensor array fabricated on a Si slider for measuring head-disk interaction

S. Imai, M. Tokuyama, S. Hirose, G.J. Burger, T.S.J. Lammerink, J.H.J. Fluitman

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Abstract

A new type of Acoustic Emission sensor using a thin film piezoelectric material (sputtered ZnO) was developed for measuring head-disk interaction in a rigid magnetic disk system. The sensor is mounted on a Si slider (length: 3 mm) and was fabricated using micro-machining techniques in our on-going efforts to downsize sliders. Some fundamental tests of the sensor were conducted: sensitivity and frequency characteristics, and a flying test over a rotating bump disk.
Original languageEnglish
Article number10.1109/20.490253
Pages (from-to)3009-3011
Number of pages3
JournalIEEE transactions on magnetics
Volume31
Issue number6
DOIs
Publication statusPublished - 18 Apr 1995

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Sensor arrays
Thin films
Sensors
Piezoelectric materials
Rotating disks
Acoustic emissions
Machining

Cite this

Imai, S. ; Tokuyama, M. ; Hirose, S. ; Burger, G.J. ; Lammerink, T.S.J. ; Fluitman, J.H.J. / Thin-film piezoelectric impact sensor array fabricated on a Si slider for measuring head-disk interaction. In: IEEE transactions on magnetics. 1995 ; Vol. 31, No. 6. pp. 3009-3011.
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Thin-film piezoelectric impact sensor array fabricated on a Si slider for measuring head-disk interaction. / Imai, S.; Tokuyama, M.; Hirose, S.; Burger, G.J.; Lammerink, T.S.J.; Fluitman, J.H.J.

In: IEEE transactions on magnetics, Vol. 31, No. 6, 10.1109/20.490253, 18.04.1995, p. 3009-3011.

Research output: Contribution to journalArticleAcademicpeer-review

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AU - Hirose, S.

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AU - Lammerink, T.S.J.

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