Thin-film piezoelectric impact sensor array fabricated on a Si slider for measuring head-disk interaction

S. Imai; M. Tokuyama; S. Hirose; G.J. Burger; T.S.J. Lammerink; J.H.J. Fluitman

doi:10.1109/20.490253

Thin-film piezoelectric impact sensor array fabricated on a Si slider for measuring head-disk interaction

S. Imai, M. Tokuyama, S. Hirose, G.J. Burger, T.S.J. Lammerink, J.H.J. Fluitman

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Abstract

A new type of Acoustic Emission sensor using a thin film piezoelectric material (sputtered ZnO) was developed for measuring head-disk interaction in a rigid magnetic disk system. The sensor is mounted on a Si slider (length: 3 mm) and was fabricated using micro-machining techniques in our on-going efforts to downsize sliders. Some fundamental tests of the sensor were conducted: sensitivity and frequency characteristics, and a flying test over a rotating bump disk.

Original language	English
Article number	10.1109/20.490253
Pages (from-to)	3009-3011
Number of pages	3
Journal	IEEE transactions on magnetics
Volume	31
Issue number	6
DOIs	https://doi.org/10.1109/20.490253
Publication status	Published - 18 Apr 1995

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abstract = "A new type of Acoustic Emission sensor using a thin film piezoelectric material (sputtered ZnO) was developed for measuring head-disk interaction in a rigid magnetic disk system. The sensor is mounted on a Si slider (length: 3 mm) and was fabricated using micro-machining techniques in our on-going efforts to downsize sliders. Some fundamental tests of the sensor were conducted: sensitivity and frequency characteristics, and a flying test over a rotating bump disk.",

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AB - A new type of Acoustic Emission sensor using a thin film piezoelectric material (sputtered ZnO) was developed for measuring head-disk interaction in a rigid magnetic disk system. The sensor is mounted on a Si slider (length: 3 mm) and was fabricated using micro-machining techniques in our on-going efforts to downsize sliders. Some fundamental tests of the sensor were conducted: sensitivity and frequency characteristics, and a flying test over a rotating bump disk.

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Thin-film piezoelectric impact sensor array fabricated on a Si slider for measuring head-disk interaction

Abstract

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