Thin-film piezoelectric impact sensor array fabricated on a Si slider for measuring head-disk interaction

S. Imai; M. Tokuyama; S. Hirose; G.J. Burger; T.S.J. Lammerink; J.H.J. Fluitman

doi:10.1109/20.490253

Thin-film piezoelectric impact sensor array fabricated on a Si slider for measuring head-disk interaction

S. Imai, M. Tokuyama, S. Hirose, G.J. Burger, T.S.J. Lammerink, J.H.J. Fluitman

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Abstract

A new type of Acoustic Emission sensor using a thin film piezoelectric material (sputtered ZnO) was developed for measuring head-disk interaction in a rigid magnetic disk system. The sensor is mounted on a Si slider (length: 3 mm) and was fabricated using micro-machining techniques in our on-going efforts to downsize sliders. Some fundamental tests of the sensor were conducted: sensitivity and frequency characteristics, and a flying test over a rotating bump disk.

Original language	English
Article number	10.1109/20.490253
Pages (from-to)	3009-3011
Number of pages	3
Journal	IEEE transactions on magnetics
Volume	31
Issue number	6
DOIs	https://doi.org/10.1109/20.490253
Publication status	Published - 18 Apr 1995

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@article{d577be9cfa4044da9080656fe39ecdaf,

title = "Thin-film piezoelectric impact sensor array fabricated on a Si slider for measuring head-disk interaction",

abstract = "A new type of Acoustic Emission sensor using a thin film piezoelectric material (sputtered ZnO) was developed for measuring head-disk interaction in a rigid magnetic disk system. The sensor is mounted on a Si slider (length: 3 mm) and was fabricated using micro-machining techniques in our on-going efforts to downsize sliders. Some fundamental tests of the sensor were conducted: sensitivity and frequency characteristics, and a flying test over a rotating bump disk.",

author = "S. Imai and M. Tokuyama and S. Hirose and G.J. Burger and T.S.J. Lammerink and J.H.J. Fluitman",

year = "1995",

month = apr,

day = "18",

doi = "10.1109/20.490253",

language = "English",

volume = "31",

pages = "3009--3011",

journal = "IEEE transactions on magnetics",

issn = "0018-9464",

publisher = "IEEE",

number = "6",

}

TY - JOUR

T1 - Thin-film piezoelectric impact sensor array fabricated on a Si slider for measuring head-disk interaction

AU - Imai, S.

AU - Tokuyama, M.

AU - Hirose, S.

AU - Burger, G.J.

AU - Lammerink, T.S.J.

AU - Fluitman, J.H.J.

PY - 1995/4/18

Y1 - 1995/4/18

N2 - A new type of Acoustic Emission sensor using a thin film piezoelectric material (sputtered ZnO) was developed for measuring head-disk interaction in a rigid magnetic disk system. The sensor is mounted on a Si slider (length: 3 mm) and was fabricated using micro-machining techniques in our on-going efforts to downsize sliders. Some fundamental tests of the sensor were conducted: sensitivity and frequency characteristics, and a flying test over a rotating bump disk.

AB - A new type of Acoustic Emission sensor using a thin film piezoelectric material (sputtered ZnO) was developed for measuring head-disk interaction in a rigid magnetic disk system. The sensor is mounted on a Si slider (length: 3 mm) and was fabricated using micro-machining techniques in our on-going efforts to downsize sliders. Some fundamental tests of the sensor were conducted: sensitivity and frequency characteristics, and a flying test over a rotating bump disk.

U2 - 10.1109/20.490253

DO - 10.1109/20.490253

M3 - Article

SN - 0018-9464

VL - 31

SP - 3009

EP - 3011

JO - IEEE transactions on magnetics

JF - IEEE transactions on magnetics

IS - 6

M1 - 10.1109/20.490253

ER -

Thin-film piezoelectric impact sensor array fabricated on a Si slider for measuring head-disk interaction

Abstract

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