Thin film PiezoMEMS by Pulsed Laser Deposition

Ruud Johannes Antonius Steenwelle, Duc Minh Nguyen, Jan M. Dekkers, X. Wan, Augustinus J.H.M. Rijnders, David H.A. Blank

Research output: Contribution to conferencePoster

Original languageUndefined
Pages-
Publication statusPublished - 1 Mar 2009

Keywords

  • METIS-261160

Cite this

Steenwelle, R. J. A., Nguyen, D. M., Dekkers, J. M., Wan, X., Rijnders, A. J. H. M., & Blank, D. H. A. (2009). Thin film PiezoMEMS by Pulsed Laser Deposition. -.