Thin film PiezoMEMS by Pulsed Laser Deposition

Ruud Johannes Antonius Steenwelle, Duc Minh Nguyen, Jan M. Dekkers, X. Wan, Augustinus J.H.M. Rijnders, David H.A. Blank

Research output: Contribution to conferencePosterOther research output

Original languageUndefined
Pages-
Publication statusPublished - 1 Mar 2009
EventPiezo 2009 - Electroceramics for End Users - Zakopane, Poland
Duration: 1 Mar 20094 Mar 2009

Conference

ConferencePiezo 2009 - Electroceramics for End Users
CityZakopane, Poland
Period1/03/094/03/09

Keywords

  • METIS-261160

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