Thin film PiezoMEMS by Pulsed Laser Deposition

Ruud Johannes Antonius Steenwelle; Duc Minh Nguyen; Jan M. Dekkers; X. Wan; Augustinus J.H.M. Rijnders; David H.A. Blank

Thin film PiezoMEMS by Pulsed Laser Deposition

Ruud Johannes Antonius Steenwelle
, Duc Minh Nguyen
, Jan M. Dekkers
, X. Wan
, Augustinus J.H.M. Rijnders
, David H.A. Blank

Inorganic Materials Science

Research output: Contribution to conference › Poster › Other research output

Original language	Undefined
Pages	-
Publication status	Published - 1 Mar 2009
Event	Piezo 2009 - Electroceramics for End Users - Zakopane, Poland Duration: 1 Mar 2009 → 4 Mar 2009

Conference

Conference	Piezo 2009 - Electroceramics for End Users
City	Zakopane, Poland
Period	1/03/09 → 4/03/09

Keywords

METIS-261160

Cite this

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title = "Thin film PiezoMEMS by Pulsed Laser Deposition",

keywords = "METIS-261160",

author = "Steenwelle, \{Ruud Johannes Antonius\} and Nguyen, \{Duc Minh\} and Dekkers, \{Jan M.\} and X. Wan and Rijnders, \{Augustinus J.H.M.\} and Blank, \{David H.A.\}",

year = "2009",

month = mar,

day = "1",

language = "Undefined",

pages = "--",

note = "Piezo 2009 - Electroceramics for End Users ; Conference date: 01-03-2009 Through 04-03-2009",

}

TY - CONF

T1 - Thin film PiezoMEMS by Pulsed Laser Deposition

AU - Steenwelle, Ruud Johannes Antonius

AU - Nguyen, Duc Minh

AU - Dekkers, Jan M.

AU - Wan, X.

AU - Rijnders, Augustinus J.H.M.

AU - Blank, David H.A.

PY - 2009/3/1

Y1 - 2009/3/1

KW - METIS-261160

M3 - Poster

SP - -

T2 - Piezo 2009 - Electroceramics for End Users

Y2 - 1 March 2009 through 4 March 2009

ER -