Thin film PiezoMEMS by Pulsed Laser Deposition

Ruud Johannes Antonius Steenwelle; Duc Minh Nguyen; Jan M. Dekkers; X. Wan; Augustinus J.H.M. Rijnders; David H.A. Blank

Thin film PiezoMEMS by Pulsed Laser Deposition

Ruud Johannes Antonius Steenwelle, Duc Minh Nguyen, Jan M. Dekkers, X. Wan, Augustinus J.H.M. Rijnders, David H.A. Blank

Inorganic Materials Science

Research output: Contribution to conference › Poster › Other research output

Original language	Undefined
Pages	-
Publication status	Published - 1 Mar 2009
Event	Piezo 2009 - Electroceramics for End Users - Zakopane, Poland Duration: 1 Mar 2009 → 4 Mar 2009

Conference

Conference	Piezo 2009 - Electroceramics for End Users
City	Zakopane, Poland
Period	1/03/09 → 4/03/09

Keywords

METIS-261160

Cite this

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title = "Thin film PiezoMEMS by Pulsed Laser Deposition",

keywords = "METIS-261160",

author = "Steenwelle, \{Ruud Johannes Antonius\} and Nguyen, \{Duc Minh\} and Dekkers, \{Jan M.\} and X. Wan and Rijnders, \{Augustinus J.H.M.\} and Blank, \{David H.A.\}",

year = "2009",

month = mar,

day = "1",

language = "Undefined",

pages = "--",

note = "Piezo 2009 - Electroceramics for End Users ; Conference date: 01-03-2009 Through 04-03-2009",

}

TY - CONF

T1 - Thin film PiezoMEMS by Pulsed Laser Deposition

AU - Steenwelle, Ruud Johannes Antonius

AU - Nguyen, Duc Minh

AU - Dekkers, Jan M.

AU - Wan, X.

AU - Rijnders, Augustinus J.H.M.

AU - Blank, David H.A.

PY - 2009/3/1

Y1 - 2009/3/1

KW - METIS-261160

M3 - Poster

SP - -

T2 - Piezo 2009 - Electroceramics for End Users

Y2 - 1 March 2009 through 4 March 2009

ER -