Thin film surface processing by ultrashort laser pulses (USLP)

D. Scorticati; G.R.B.E. Römer; J.Z.P. Skolski; A.J. Huis in 't Veld; M. Workum; M. Theelen; M. Zeman

doi:10.1117/12.922270

Thin film surface processing by ultrashort laser pulses (USLP)

D. Scorticati
, G.R.B.E. Römer
, J.Z.P. Skolski
, A.J. Huis in 't Veld
, M. Workum
, M. Theelen
, M. Zeman

Faculty of Engineering Technology

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

3 Citations (Scopus)

2 Downloads (Pure)

Abstract

In this work, we studied the feasibility of surface texturing of thin molybdenum layers on a borosilicate glass substrate with Ultra-Short Laser Pulses (USLP). Large areas of regular diffraction gratings were produced consisting of Laserinduced periodic surface structures (LIPSS). A short pulsed laser source (230 fs-10 ps) was applied using a focused Gaussian beam profile (15-30 μm). Laser parameters such as fluence, overlap (OL) and Overscans (OS), repetition frequency (100-200 kHz), wavelength (1030 nm, 515 nm and 343 nm) and polarization were varied to study the effect on periodicity, height and especially regularity of LIPSS obtained in layers of different thicknesses (150-400 nm). The aim was to produce these structures without cracking the metal layer and with as little ablation as possible. It was found that USLP are suitable to reach high power densities at the surface of the thin layers, avoiding mechanical stresses, cracking and delamination. A possible photovoltaic (PV) application could be found in texturing of thin film cells to enhance light trapping mechanisms

Original language	English
Title of host publication	Proceedings SPIE 8438, Photonics for Solar Energy Systems IV
Editors	R. Wehrspohn, A. Gombert
Place of Publication	Brussels, Belgium
Publisher	SPIE
Pages	1-8
DOIs	https://doi.org/10.1117/12.922270
Publication status	Published - 16 Apr 2012
Event	SPIE 8438, Photonics for Solar Energy Systems IV - Brussels, Belgium Duration: 16 Apr 2012 → 19 Apr 2012

Conference

Conference	SPIE 8438, Photonics for Solar Energy Systems IV
Period	16/04/12 → 19/04/12
Other	16-04-2012 - 19-04-2012

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

SDG 7 Affordable and Clean Energy

Keywords

IR-81998
METIS-288714

Access to Document

10.1117/12.922270

Cite this

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title = "Thin film surface processing by ultrashort laser pulses (USLP)",

abstract = "In this work, we studied the feasibility of surface texturing of thin molybdenum layers on a borosilicate glass substrate with Ultra-Short Laser Pulses (USLP). Large areas of regular diffraction gratings were produced consisting of Laserinduced periodic surface structures (LIPSS). A short pulsed laser source (230 fs-10 ps) was applied using a focused Gaussian beam profile (15-30 μm). Laser parameters such as fluence, overlap (OL) and Overscans (OS), repetition frequency (100-200 kHz), wavelength (1030 nm, 515 nm and 343 nm) and polarization were varied to study the effect on periodicity, height and especially regularity of LIPSS obtained in layers of different thicknesses (150-400 nm). The aim was to produce these structures without cracking the metal layer and with as little ablation as possible. It was found that USLP are suitable to reach high power densities at the surface of the thin layers, avoiding mechanical stresses, cracking and delamination. A possible photovoltaic (PV) application could be found in texturing of thin film cells to enhance light trapping mechanisms",

keywords = "IR-81998, METIS-288714",

author = "D. Scorticati and G.R.B.E. R{\"o}mer and J.Z.P. Skolski and \{Huis in 't Veld\}, A.J. and M. Workum and M. Theelen and M. Zeman",

note = "papernumber: 84380T ; SPIE 8438, Photonics for Solar Energy Systems IV ; Conference date: 16-04-2012 Through 19-04-2012",

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doi = "10.1117/12.922270",

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Scorticati, D, Römer, GRBE, Skolski, JZP, Huis in 't Veld, AJ, Workum, M, Theelen, M & Zeman, M 2012, Thin film surface processing by ultrashort laser pulses (USLP). in R Wehrspohn & A Gombert (eds), Proceedings SPIE 8438, Photonics for Solar Energy Systems IV. SPIE, Brussels, Belgium, pp. 1-8, SPIE 8438, Photonics for Solar Energy Systems IV, 16/04/12. https://doi.org/10.1117/12.922270

Thin film surface processing by ultrashort laser pulses (USLP). / Scorticati, D.; Römer, G.R.B.E.; Skolski, J.Z.P. et al.
Proceedings SPIE 8438, Photonics for Solar Energy Systems IV. ed. / R. Wehrspohn; A. Gombert. Brussels, Belgium: SPIE, 2012. p. 1-8.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

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T1 - Thin film surface processing by ultrashort laser pulses (USLP)

AU - Scorticati, D.

AU - Römer, G.R.B.E.

AU - Skolski, J.Z.P.

AU - Huis in 't Veld, A.J.

AU - Workum, M.

AU - Theelen, M.

AU - Zeman, M.

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N2 - In this work, we studied the feasibility of surface texturing of thin molybdenum layers on a borosilicate glass substrate with Ultra-Short Laser Pulses (USLP). Large areas of regular diffraction gratings were produced consisting of Laserinduced periodic surface structures (LIPSS). A short pulsed laser source (230 fs-10 ps) was applied using a focused Gaussian beam profile (15-30 μm). Laser parameters such as fluence, overlap (OL) and Overscans (OS), repetition frequency (100-200 kHz), wavelength (1030 nm, 515 nm and 343 nm) and polarization were varied to study the effect on periodicity, height and especially regularity of LIPSS obtained in layers of different thicknesses (150-400 nm). The aim was to produce these structures without cracking the metal layer and with as little ablation as possible. It was found that USLP are suitable to reach high power densities at the surface of the thin layers, avoiding mechanical stresses, cracking and delamination. A possible photovoltaic (PV) application could be found in texturing of thin film cells to enhance light trapping mechanisms

AB - In this work, we studied the feasibility of surface texturing of thin molybdenum layers on a borosilicate glass substrate with Ultra-Short Laser Pulses (USLP). Large areas of regular diffraction gratings were produced consisting of Laserinduced periodic surface structures (LIPSS). A short pulsed laser source (230 fs-10 ps) was applied using a focused Gaussian beam profile (15-30 μm). Laser parameters such as fluence, overlap (OL) and Overscans (OS), repetition frequency (100-200 kHz), wavelength (1030 nm, 515 nm and 343 nm) and polarization were varied to study the effect on periodicity, height and especially regularity of LIPSS obtained in layers of different thicknesses (150-400 nm). The aim was to produce these structures without cracking the metal layer and with as little ablation as possible. It was found that USLP are suitable to reach high power densities at the surface of the thin layers, avoiding mechanical stresses, cracking and delamination. A possible photovoltaic (PV) application could be found in texturing of thin film cells to enhance light trapping mechanisms

KW - IR-81998

KW - METIS-288714

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DO - 10.1117/12.922270

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BT - Proceedings SPIE 8438, Photonics for Solar Energy Systems IV

A2 - Wehrspohn, R.

A2 - Gombert, A.

PB - SPIE

CY - Brussels, Belgium

T2 - SPIE 8438, Photonics for Solar Energy Systems IV

Y2 - 16 April 2012 through 19 April 2012

ER -

Thin film surface processing by ultrashort laser pulses (USLP)

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UN SDGs

Keywords

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