Thin films of conductive ZnO patterned by micromolding resulting in nearly isolated features

Ole Göbel, David H.A. Blank, Johan E. ten Elshof

Research output: Contribution to journalArticleAcademicpeer-review

16 Citations (Scopus)

Abstract

Patterned and continuous thin films of conductive Al-doped zinc oxide (ZnO:Al) were prepared on different substrates from a polymeric precursor solution. Their electric conductivity and light transmittance (for visible and UV light) was measured at room temperature. By means of a simple device, conductive ZnO:Al films with high fidelity patterns with features of 2−20 μm width could be obtained by simply micromolding the liquid precursor film prior to heat treatment. The individual features were interconnected by a very thin residual ZnO layer.
Original languageEnglish
Pages (from-to)536-543
Number of pages8
JournalACS applied materials & interfaces
Volume2
Issue number2
DOIs
Publication statusPublished - 2010

Keywords

  • IR-72407
  • METIS-269422

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