Original language | English |
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Title of host publication | Ellipsometry at the Nanoscale |
Editors | M. Losurdo, K. Hingerl |
Place of Publication | Berlin, Heidelberg, New York |
Publisher | Springer |
Pages | - |
ISBN (Print) | 978-3-642-33955-4 |
Publication status | Published - 18 Feb 2013 |
Publication series
Name | |
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Publisher | Springer Verlag |
Keywords
- METIS-296587
- IR-89924