Thin Films of Two Functional Oxides Patterned Laterally by Soft Lithography

Ole Göbel, Tomasz Stawski, Johan E. ten Elshof

Research output: Contribution to journalArticleAcademicpeer-review

4 Citations (Scopus)

Abstract

Thin films of two laterally patterned functional oxides of uniform thickness were obtained in a two-step soft-lithographic micromolding process. CoFe2O4/ZnO and CoFe2O4/BaTiO3 dual-phase patterns were fabricated. The films showed good replication of the pattern that was defined in the first patterning step. X-ray diffraction showed that the films consisted of two distinct phases, and magnetic force microscopy showed that the compounds were laterally separated, the separation pattern being the same as that of the initial soft-lithographic process. The films exhibited slight height variations near the edges of the phases, which were introduced in the first deposition step and were not fully compensated in the second deposition step. The films are sufficiently smooth to allow fabrication of multilayer structures.
Original languageEnglish
Pages (from-to)40-43
Number of pages4
JournalACS applied materials & interfaces
Volume4
Issue number1
DOIs
Publication statusPublished - 2012

Keywords

  • METIS-288493
  • IR-81872

Fingerprint Dive into the research topics of 'Thin Films of Two Functional Oxides Patterned Laterally by Soft Lithography'. Together they form a unique fingerprint.

  • Cite this